JPS6378863U - - Google Patents

Info

Publication number
JPS6378863U
JPS6378863U JP17240686U JP17240686U JPS6378863U JP S6378863 U JPS6378863 U JP S6378863U JP 17240686 U JP17240686 U JP 17240686U JP 17240686 U JP17240686 U JP 17240686U JP S6378863 U JPS6378863 U JP S6378863U
Authority
JP
Japan
Prior art keywords
supply
piston
exhaust passage
gas
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17240686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17240686U priority Critical patent/JPS6378863U/ja
Publication of JPS6378863U publication Critical patent/JPS6378863U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP17240686U 1986-11-10 1986-11-10 Pending JPS6378863U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17240686U JPS6378863U (cs) 1986-11-10 1986-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17240686U JPS6378863U (cs) 1986-11-10 1986-11-10

Publications (1)

Publication Number Publication Date
JPS6378863U true JPS6378863U (cs) 1988-05-25

Family

ID=31108911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17240686U Pending JPS6378863U (cs) 1986-11-10 1986-11-10

Country Status (1)

Country Link
JP (1) JPS6378863U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014139498A (ja) * 2013-01-21 2014-07-31 Sumitomo Heavy Ind Ltd 極低温冷凍機

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57169565A (en) * 1981-04-14 1982-10-19 Osaka Oxygen Ind Gas cycle refrigerating plant

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57169565A (en) * 1981-04-14 1982-10-19 Osaka Oxygen Ind Gas cycle refrigerating plant

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014139498A (ja) * 2013-01-21 2014-07-31 Sumitomo Heavy Ind Ltd 極低温冷凍機

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