JPS6378288U - - Google Patents

Info

Publication number
JPS6378288U
JPS6378288U JP17249086U JP17249086U JPS6378288U JP S6378288 U JPS6378288 U JP S6378288U JP 17249086 U JP17249086 U JP 17249086U JP 17249086 U JP17249086 U JP 17249086U JP S6378288 U JPS6378288 U JP S6378288U
Authority
JP
Japan
Prior art keywords
laser
interference fringes
reference light
parallel rod
mirror surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17249086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452704Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17249086U priority Critical patent/JPH0452704Y2/ja
Publication of JPS6378288U publication Critical patent/JPS6378288U/ja
Application granted granted Critical
Publication of JPH0452704Y2 publication Critical patent/JPH0452704Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP17249086U 1986-11-10 1986-11-10 Expired JPH0452704Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17249086U JPH0452704Y2 (enExample) 1986-11-10 1986-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17249086U JPH0452704Y2 (enExample) 1986-11-10 1986-11-10

Publications (2)

Publication Number Publication Date
JPS6378288U true JPS6378288U (enExample) 1988-05-24
JPH0452704Y2 JPH0452704Y2 (enExample) 1992-12-10

Family

ID=31109073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17249086U Expired JPH0452704Y2 (enExample) 1986-11-10 1986-11-10

Country Status (1)

Country Link
JP (1) JPH0452704Y2 (enExample)

Also Published As

Publication number Publication date
JPH0452704Y2 (enExample) 1992-12-10

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