JPS6378288U - - Google Patents

Info

Publication number
JPS6378288U
JPS6378288U JP17249086U JP17249086U JPS6378288U JP S6378288 U JPS6378288 U JP S6378288U JP 17249086 U JP17249086 U JP 17249086U JP 17249086 U JP17249086 U JP 17249086U JP S6378288 U JPS6378288 U JP S6378288U
Authority
JP
Japan
Prior art keywords
laser
interference fringes
reference light
parallel rod
mirror surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17249086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452704Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17249086U priority Critical patent/JPH0452704Y2/ja
Publication of JPS6378288U publication Critical patent/JPS6378288U/ja
Application granted granted Critical
Publication of JPH0452704Y2 publication Critical patent/JPH0452704Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP17249086U 1986-11-10 1986-11-10 Expired JPH0452704Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17249086U JPH0452704Y2 (cg-RX-API-DMAC7.html) 1986-11-10 1986-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17249086U JPH0452704Y2 (cg-RX-API-DMAC7.html) 1986-11-10 1986-11-10

Publications (2)

Publication Number Publication Date
JPS6378288U true JPS6378288U (cg-RX-API-DMAC7.html) 1988-05-24
JPH0452704Y2 JPH0452704Y2 (cg-RX-API-DMAC7.html) 1992-12-10

Family

ID=31109073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17249086U Expired JPH0452704Y2 (cg-RX-API-DMAC7.html) 1986-11-10 1986-11-10

Country Status (1)

Country Link
JP (1) JPH0452704Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0452704Y2 (cg-RX-API-DMAC7.html) 1992-12-10

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