JPS637815U - - Google Patents

Info

Publication number
JPS637815U
JPS637815U JP10125386U JP10125386U JPS637815U JP S637815 U JPS637815 U JP S637815U JP 10125386 U JP10125386 U JP 10125386U JP 10125386 U JP10125386 U JP 10125386U JP S637815 U JPS637815 U JP S637815U
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
base
utility
dimension
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10125386U
Other languages
English (en)
Other versions
JPH057773Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986101253U priority Critical patent/JPH057773Y2/ja
Publication of JPS637815U publication Critical patent/JPS637815U/ja
Application granted granted Critical
Publication of JPH057773Y2 publication Critical patent/JPH057773Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【図面の簡単な説明】
第１図は、本考案の圧電振動子の斜視図。第２
図は、第１図の薄部の部分断面図である。 １０……圧電振動子、１１……振動部、１２…
…基部、１３……薄部。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 振動部と基部から成りフオトリソグラフイ
    ー法によるエツチング加工で一体成形する圧電振
    動子において、該基部の少なくとも一部分に厚み
    寸法の異なる薄部を設けたことを特徴とする圧電
    振動子。 (2) 回転Ｙ板をＸ軸を中心にθ回転して出来る
    新たなＺ′軸方向の該薄部の寸法ｌが、厚み寸法
    をｔとしてｔ／ｔａｎθ以下であることを特徴と
    する実用新案登録請求の範囲第１項記載の圧電振
    動子。
JP1986101253U 1986-06-30 1986-06-30 Expired - Lifetime JPH057773Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986101253U JPH057773Y2 (ja) 1986-06-30 1986-06-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986101253U JPH057773Y2 (ja) 1986-06-30 1986-06-30

Publications (2)

Publication Number Publication Date
JPS637815U true JPS637815U (ja) 1988-01-19
JPH057773Y2 JPH057773Y2 (ja) 1993-02-26

Family

ID=30971830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986101253U Expired - Lifetime JPH057773Y2 (ja) 1986-06-30 1986-06-30

Country Status (1)

Country Link
JP (1) JPH057773Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008109475A (ja) * 2006-10-26 2008-05-08 Kyocera Kinseki Corp 水晶振動板及びその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327740U (ja) * 1976-08-18 1978-03-09
JPS59128814A (ja) * 1983-01-13 1984-07-25 Nippon Dempa Kogyo Co Ltd 圧電振動子

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327740B2 (ja) * 1972-09-27 1978-08-10

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327740U (ja) * 1976-08-18 1978-03-09
JPS59128814A (ja) * 1983-01-13 1984-07-25 Nippon Dempa Kogyo Co Ltd 圧電振動子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008109475A (ja) * 2006-10-26 2008-05-08 Kyocera Kinseki Corp 水晶振動板及びその製造方法

Also Published As

Publication number Publication date
JPH057773Y2 (ja) 1993-02-26

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