JPS6378068U - - Google Patents
Info
- Publication number
- JPS6378068U JPS6378068U JP17224486U JP17224486U JPS6378068U JP S6378068 U JPS6378068 U JP S6378068U JP 17224486 U JP17224486 U JP 17224486U JP 17224486 U JP17224486 U JP 17224486U JP S6378068 U JPS6378068 U JP S6378068U
- Authority
- JP
- Japan
- Prior art keywords
- roll
- film surface
- film
- vacuum chamber
- rolls
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 claims 6
- 238000000151 deposition Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000004804 winding Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17224486U JPS6378068U (cs) | 1986-11-10 | 1986-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17224486U JPS6378068U (cs) | 1986-11-10 | 1986-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6378068U true JPS6378068U (cs) | 1988-05-24 |
Family
ID=31108611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17224486U Pending JPS6378068U (cs) | 1986-11-10 | 1986-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6378068U (cs) |
-
1986
- 1986-11-10 JP JP17224486U patent/JPS6378068U/ja active Pending