JPH02106459U - - Google Patents
Info
- Publication number
- JPH02106459U JPH02106459U JP1359389U JP1359389U JPH02106459U JP H02106459 U JPH02106459 U JP H02106459U JP 1359389 U JP1359389 U JP 1359389U JP 1359389 U JP1359389 U JP 1359389U JP H02106459 U JPH02106459 U JP H02106459U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- chamber
- vacuum
- substrate
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 8
- 230000008020 evaporation Effects 0.000 claims description 8
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1359389U JPH02106459U (cs) | 1989-02-09 | 1989-02-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1359389U JPH02106459U (cs) | 1989-02-09 | 1989-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02106459U true JPH02106459U (cs) | 1990-08-23 |
Family
ID=31224032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1359389U Pending JPH02106459U (cs) | 1989-02-09 | 1989-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02106459U (cs) |
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1989
- 1989-02-09 JP JP1359389U patent/JPH02106459U/ja active Pending