JPS6378066U - - Google Patents
Info
- Publication number
- JPS6378066U JPS6378066U JP17182586U JP17182586U JPS6378066U JP S6378066 U JPS6378066 U JP S6378066U JP 17182586 U JP17182586 U JP 17182586U JP 17182586 U JP17182586 U JP 17182586U JP S6378066 U JPS6378066 U JP S6378066U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- film
- holding ring
- holds
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17182586U JPH0538051Y2 ( ) | 1986-11-08 | 1986-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17182586U JPH0538051Y2 ( ) | 1986-11-08 | 1986-11-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6378066U true JPS6378066U ( ) | 1988-05-24 |
| JPH0538051Y2 JPH0538051Y2 ( ) | 1993-09-27 |
Family
ID=31107812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17182586U Expired - Lifetime JPH0538051Y2 ( ) | 1986-11-08 | 1986-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0538051Y2 ( ) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005042114A (ja) * | 2003-07-24 | 2005-02-17 | General Electric Co <Ge> | 薄膜の取り扱いを容易にする方法及び器具 |
-
1986
- 1986-11-08 JP JP17182586U patent/JPH0538051Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005042114A (ja) * | 2003-07-24 | 2005-02-17 | General Electric Co <Ge> | 薄膜の取り扱いを容易にする方法及び器具 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0538051Y2 ( ) | 1993-09-27 |