JPS63777B2 - - Google Patents
Info
- Publication number
- JPS63777B2 JPS63777B2 JP16507683A JP16507683A JPS63777B2 JP S63777 B2 JPS63777 B2 JP S63777B2 JP 16507683 A JP16507683 A JP 16507683A JP 16507683 A JP16507683 A JP 16507683A JP S63777 B2 JPS63777 B2 JP S63777B2
- Authority
- JP
- Japan
- Prior art keywords
- foreign matter
- metal frame
- transparent substrate
- minute
- pellicle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 36
- 239000000853 adhesive Substances 0.000 claims description 30
- 230000001070 adhesive effect Effects 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 29
- 239000000126 substance Substances 0.000 claims description 28
- 239000010408 film Substances 0.000 claims description 27
- 239000012528 membrane Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 12
- 239000010409 thin film Substances 0.000 claims description 12
- 230000005684 electric field Effects 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 5
- 238000009877 rendering Methods 0.000 claims description 4
- 230000002265 prevention Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000020 Nitrocellulose Substances 0.000 description 2
- 229920001220 nitrocellulos Polymers 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、半導体製造に用いられるフオトマス
クやレチクル等の透明基板をペリクル膜で覆つて
異物の付着を防止する場合、上記の透明基板とペ
リクル膜との間に混入して封入された微小な異物
を固定して無害化する方法、およびその装置に関
するものである。ここに微小な異物とは、空中に
浮遊する程度の大きさの異物粒子を意味する。Detailed Description of the Invention [Field of Application of the Invention] The present invention provides a method for covering a transparent substrate such as a photomask or reticle used in semiconductor manufacturing with a pellicle film to prevent foreign matter from adhering to the transparent substrate and the pellicle film. The present invention relates to a method for fixing and rendering harmless minute foreign matter that has been mixed and encapsulated between objects, and an apparatus therefor. Here, the term "fine foreign matter" refers to foreign matter particles that are large enough to float in the air.
半導体製造用のフオトマスクやレチクル等の透
明基板への異物付着を防止するため、ニトロセル
ローズ製の薄膜を金属製の枠に貼りつけた構造の
ペリクル膜が用いられる。第1図はその斜視図で
ある。
In order to prevent foreign matter from adhering to transparent substrates such as photomasks and reticles for semiconductor manufacturing, a pellicle film is used, which has a structure in which a thin film made of nitrocellulose is attached to a metal frame. FIG. 1 is a perspective view thereof.
1は透明基板、2はその表面である。一方、ニ
トロセルローズ製の薄膜を金属枠3に貼りつけて
ペリクル膜5を構成し、これを透明基板1の表面
に装着して異物の付着を防止する。本図には片面
しか現われていないが、通常、透明基板1の両面
にそれぞれペリクル膜5が装着される。この操作
は無塵室内で行なわれるが、極微量の浮遊異物が
ペリクル膜と透明基板との間に混入することは避
け難い。 1 is a transparent substrate, and 2 is its surface. On the other hand, a pellicle film 5 is formed by pasting a thin film made of nitrocellulose on the metal frame 3, and this is attached to the surface of the transparent substrate 1 to prevent attachment of foreign matter. Although only one side is shown in this figure, pellicle films 5 are usually attached to both sides of the transparent substrate 1, respectively. Although this operation is performed in a dust-free chamber, it is unavoidable that a minute amount of floating foreign matter gets mixed in between the pellicle film and the transparent substrate.
第2図aは微小異物の混入状態の説明図で、読
図を容易ならしめるように微小異物を拡大して描
いてある。 FIG. 2a is an explanatory diagram of a state in which minute foreign matter is mixed in, and the minute foreign matter is enlarged to make it easier to read.
異物は大別すると、湿気や油により高い粘着性
を示すものと、乾燥して電荷を帯びたものとの2
種類に分けることができる。 Foreign substances can be roughly divided into two types: those that exhibit high stickiness due to moisture or oil, and those that have dried and become electrically charged.
It can be divided into types.
第2図aに示した8a,8dは金属枠3の内面
4に付着した微小異物を表わしている。このよう
に金属枠内面4に付着した異物は、その検出が特
に困難である。 8a and 8d shown in FIG. 2a represent minute foreign matter attached to the inner surface 4 of the metal frame 3. It is particularly difficult to detect foreign matter adhering to the inner surface 4 of the metal frame in this way.
7a,7bは空間6内に浮遊している微小異物
を、8b,8cはペリクル膜5に付着している微
小異物を、それぞれ表わしている。 7a and 7b represent minute foreign matter floating in the space 6, and 8b and 8c represent minute foreign matter adhering to the pellicle membrane 5, respectively.
前記のように金属枠内面4に付着した微小異物
は検出が困難なため、半導体製造工程の途中で見
逃がされ易い。この付着異物がそのまま付着し続
けていれば障害を及ぼさないのであるが、第2図
bに示すように、搬送時の振動や、微小異物の帯
電が自然放電で失われることなどによつてこれら
の異物が移動、透明基板1に付着する虞れが有
り、この状態で露光を行なうとウエハに欠陥を生
じる。 As described above, since it is difficult to detect minute foreign matter adhering to the inner surface 4 of the metal frame, it is easy to overlook it during the semiconductor manufacturing process. If these foreign particles continue to adhere, they will not cause any damage, but as shown in Figure 2b, they can be caused by vibrations during transportation and the loss of charge of microscopic foreign particles due to natural discharge. There is a risk that the foreign matter will move and adhere to the transparent substrate 1, and if exposure is performed in this state, defects will occur on the wafer.
本発明は上述の事情に鑑みて為され、ペリクル
膜と透明基板との間に混入して封入されてしまつ
た微小な異物を固定して無害化し得る方法、およ
び上記の方法を実施するに好適な装置を提供する
ことを目的とする。
The present invention has been made in view of the above-mentioned circumstances, and provides a method capable of fixing and rendering harmless minute foreign matter that has been mixed and sealed between a pellicle film and a transparent substrate, and is suitable for implementing the above-mentioned method. The purpose is to provide a device that is easy to use.
上記の目的を達成するため、本発明は金属枠に
支承されたペリクル膜で透明基板を覆つて異物の
付着を防止する方法において、上記金属枠の内面
に予め粘着性物質の薄膜を設けておき、ペリクル
膜と透明基板との間に封入された微小な異物が浮
遊した場合、この微小異物を前記の粘着性物質に
付着せしめて固定し、該微小異物を無害化する一
方、前記のペリクル膜で覆つた透明基板を電界中
に位置せしめ、前記の微小異物をクーロン力によ
つて金属枠に引きつけ、前記の粘着性物質に付着
せしめて固定し、該微小異物を無害化するもので
ある。
To achieve the above object, the present invention provides a method for covering a transparent substrate with a pellicle film supported on a metal frame to prevent the adhesion of foreign matter, in which a thin film of an adhesive substance is previously provided on the inner surface of the metal frame. When a minute foreign object sealed between the pellicle film and the transparent substrate floats, the minute foreign object is fixed by adhering to the adhesive substance, making the minute foreign object harmless, and the pellicle film is The transparent substrate covered with the transparent substrate is placed in an electric field, and the minute foreign matter is attracted to the metal frame by Coulomb force, and is fixed by adhering to the adhesive substance, thereby rendering the minute foreign matter harmless.
第3図は、本発明を適用した異物固定装置によ
つて本発明の異物固定方法を実施する1例の説明
図である。
FIG. 3 is an explanatory diagram of an example of implementing the foreign matter fixing method of the present invention using a foreign matter fixing device to which the present invention is applied.
ペリクル膜5を支承している金属枠3の内面4
に粘着性物質の薄膜9を構成する。 Inner surface 4 of metal frame 3 supporting pellicle membrane 5
A thin film 9 of adhesive substance is formed on the surface.
本実施例においては、金属枠3の内側に両面粘
着テープを貼りつけて貼着性薄膜9を形成してあ
る。 In this embodiment, double-sided adhesive tape is attached to the inside of the metal frame 3 to form an adhesive thin film 9.
透明基板1とペリクル膜5との間の空間6内に
混入して封入された浮遊微小異物10a〜10h
は、それぞれ波線矢印で示したように不規則に移
動するが、時間の経過とともに或る確率で粘着性
薄膜9に接触する。接触した微小異物は、一旦粘
着性薄膜9に触れると粘着力によつて捕捉され、
その位置に固定されて第3図bに示す状態とな
る。 Floating minute foreign matter 10a to 10h mixed and sealed in the space 6 between the transparent substrate 1 and the pellicle film 5
move irregularly as shown by the wavy arrows, but as time passes, they come into contact with the adhesive thin film 9 with a certain probability. Once the contacting minute foreign matter touches the adhesive thin film 9, it is captured by the adhesive force,
It is fixed in that position and becomes the state shown in FIG. 3b.
第4図a〜dは上記と異なる実施例の説明図で
ある。透明基板1、金属枠3、ペリクル膜5およ
び粘着性薄膜9は前記の実施例におけると同様の
構成部材である。そして、上記金属枠3に電極1
1が接続されており、さらにペリクル膜5の上面
にはペリクル膜を全てカバーする大きさで電極1
1とは逆の極性をもつ電極12が設置されてい
る。なお電極12は、ペリクル膜を傷つけないよ
う数mm程ペリクル膜5から離してある。15は電
極11および同12に高電圧を印加するための高
圧電源であり、14はその高電圧の極性を切換え
るための極性切換装置である。 FIGS. 4a to 4d are explanatory diagrams of an embodiment different from the above. The transparent substrate 1, metal frame 3, pellicle film 5, and adhesive thin film 9 are the same constituent members as in the previous embodiment. Then, the electrode 1 is placed on the metal frame 3.
Furthermore, an electrode 1 is connected to the top surface of the pellicle membrane 5 with a size that covers the entire pellicle membrane.
An electrode 12 having a polarity opposite to that of 1 is provided. Note that the electrode 12 is separated from the pellicle film 5 by several mm so as not to damage the pellicle film. 15 is a high voltage power supply for applying a high voltage to the electrodes 11 and 12, and 14 is a polarity switching device for switching the polarity of the high voltage.
今、同図aに示すように、電極11すなわち金
属枠3に正の電圧を、電極12に負の電圧を印加
すると、両者の間に発生する電気力線は16のよ
うに金属枠3から電極12に向かう曲線となる。
本実施例においては、金属枠3と透明基板1との
間に無縁性材料13を介装し、電気力線16が透
明基板1を通らないようにしてある。これによ
り、同図bに示すように、空間6内に存在する帯
電微小異物のうち、正の電荷を帯びた異物17は
(電極12との間に働くクーロン力によりペリク
ル膜5の表面に付着する。一方負の電荷を帯びた
異物18は同様にして金属枠3に引き寄せられ、
粘着性物質9の表面上に付着し半永久的に固定さ
れる。 Now, as shown in figure a, when a positive voltage is applied to the electrode 11, that is, the metal frame 3, and a negative voltage is applied to the electrode 12, the lines of electric force generated between the two are from the metal frame 3 as shown in 16. The curve is directed toward the electrode 12.
In this embodiment, an inert material 13 is interposed between the metal frame 3 and the transparent substrate 1 to prevent the electric lines of force 16 from passing through the transparent substrate 1. As a result, as shown in FIG. On the other hand, the negatively charged foreign matter 18 is similarly attracted to the metal frame 3,
It adheres to the surface of the adhesive substance 9 and is fixed semi-permanently.
次に、同図cに示すように、極性切換装置14
により金属枠3と電極12の極性を逆にすると両
者の間に発生する電気力線は電極12から金属枠
3に向かう曲線となる。従つて同図dに示す如く
ペリクル膜表面に付着した正の電荷を帯びた異物
17は、金属枠3に引き寄せられ、粘着性物質9
の表面上に付着して半永久的に固定される。一
方、既に粘着性物質9の表面上に固定されていた
負の電荷を帯びた異物18は、電極12との間に
働くクーロン力が粘着性物質9の粘着力よりも小
さいため、そのまま粘着性物質9の表面に固定さ
れる。このように、電界をかけ且つ電界の方向を
切換えると、空間6内に存在した正、負の帯電微
小異物17,18は全て金属枠3の内面に固定さ
れて無害となる。 Next, as shown in figure c, the polarity switching device 14
When the polarities of the metal frame 3 and the electrode 12 are reversed, the lines of electric force generated between them become curves directed from the electrode 12 to the metal frame 3. Therefore, as shown in FIG.
It is attached semi-permanently to the surface of the On the other hand, the negatively charged foreign matter 18 that has already been fixed on the surface of the sticky substance 9 remains sticky because the Coulomb force acting between it and the electrode 12 is smaller than the adhesive force of the sticky substance 9. It is fixed on the surface of substance 9. In this way, when an electric field is applied and the direction of the electric field is switched, all the positively and negatively charged minute foreign objects 17 and 18 existing in the space 6 are fixed to the inner surface of the metal frame 3 and become harmless.
第5図a,bは、第4図に示した実施例と異な
る実施例の説明図であつて、前例と異なるところ
は次のごとくである。 FIGS. 5a and 5b are explanatory diagrams of an embodiment different from the embodiment shown in FIG. 4, and the differences from the previous example are as follows.
前例(第4図)においては電極11が金枠3に
電位を与えるように構成したが、本例(第5図)
は電極19が2個の金枠3にそれぞれ電位を与え
るとともに、電極20が透明基板1に反対電位
(電極19と反対の意)を与えるように構成して
ある。 In the previous example (Fig. 4), the electrode 11 was configured to apply a potential to the metal frame 3, but in this example (Fig. 5)
The structure is such that the electrode 19 applies a potential to each of the two metal frames 3, and the electrode 20 applies an opposite potential (opposite to the electrode 19) to the transparent substrate 1.
今、同図aに示すように、電極すなわち金属枠
3に正の電圧を、電極12及び20に負の電圧を
印加すると、空間6内に存在する帯電微小異物の
うち正の電荷を帯びた異物17は、電極12及び
透明基板1との間に働くクーロン力によりペリク
ル膜5の表面及び透明基板1の表面2に付着す
る。一方、負の電荷を帯びた異物18は、同様に
して金属枠3に引き寄せられ、粘着性物質9の表
面上に付着し半永久的に固定される。 Now, as shown in FIG. The foreign matter 17 adheres to the surface of the pellicle film 5 and the surface 2 of the transparent substrate 1 due to the Coulomb force acting between the electrode 12 and the transparent substrate 1 . On the other hand, the negatively charged foreign matter 18 is similarly attracted to the metal frame 3, adheres to the surface of the adhesive substance 9, and is fixed semi-permanently.
次に同図bに示すように、極性切換装置14に
より金属枠3と電極12及び20の極性を逆にす
ると、同図aと同様の動作によりペリクル膜表面
に付着した正の電荷を帯びた異物17は、金属枠
3に引き寄せられ、粘着性物質9の表面上に付着
し半永久的に固定される。一方、既に粘着性物質
9の表面に固定されていた負の電荷を帯びた異物
18は、電極12との間に働くクーロン力が粘着
性物質9の粘着力よりも小さいため、そのまま粘
着性物質9の表面上に固定されている。このよう
にして、空間6内の正帯微小異物17および負帯
電微小異物18が総べて粘着性の薄膜9に捕捉、
固定されて無害な状態となる。 Next, as shown in Figure b, when the polarity of the metal frame 3 and the electrodes 12 and 20 is reversed by the polarity switching device 14, the positive charge attached to the pellicle membrane surface is removed by the same operation as in Figure a. The foreign matter 17 is attracted to the metal frame 3, adheres to the surface of the adhesive substance 9, and is fixed semi-permanently. On the other hand, the negatively charged foreign matter 18 that has already been fixed on the surface of the adhesive substance 9 remains attached to the adhesive substance 9 because the Coulomb force acting between it and the electrode 12 is smaller than the adhesive force of the adhesive substance 9. 9 is fixed on the surface. In this way, the positively charged minute foreign matter 17 and the negatively charged minute foreign matter 18 in the space 6 are all captured by the adhesive thin film 9,
Fixed and harmless.
第6図aは更に異なる実施例を示す。第4図の
実施例に於て1板の平板状に構成した電極12に
対応する部材として、本実施例では複数の同心状
電極21〜25を構成する。26〜29は電気絶
縁物である。 FIG. 6a shows a further different embodiment. In the embodiment shown in FIG. 4, a plurality of concentric electrodes 21 to 25 are constructed as members corresponding to the electrode 12 constructed in the form of a single plate in the embodiment shown in FIG. 26 to 29 are electrical insulators.
第6図bに示すように、上記の各電極21〜2
5に対してそれぞれ個別に電位を与え得るよう極
性切換装置30を設ける。第7図a〜cは上記実
施例の用法および作用の説明図である。 As shown in FIG. 6b, each of the above electrodes 21 to 2
A polarity switching device 30 is provided so that a potential can be individually applied to each of the polarities 5 and 5. FIGS. 7a to 7c are explanatory diagrams of the usage and operation of the above embodiment.
第7図aに示すごとく、中央部の電極21に正
の電圧を、電極11及び同22〜25に負の電圧
を印加すると、空間6内の帯電微小異物のうち、
正に帯電した異物17は、金属枠3及び電極22
〜25相互の間のクーロン力により、あるものは
金属枠3に引き寄せられ粘着性物質9の表面上に
付着し半永久的に固定され、別のあるものはペリ
クル膜5の表面のうち電極22〜25に面する領
域に付着する。一方、負の電荷を帯びたもの18
は、同様にしてペリクル膜5の表面のうち電極2
1に面する領域に付着する。 As shown in FIG. 7a, when a positive voltage is applied to the central electrode 21 and a negative voltage is applied to the electrodes 11 and 22 to 25, among the charged minute foreign particles in the space 6,
The positively charged foreign matter 17 is attached to the metal frame 3 and the electrode 22.
Due to the Coulomb force between ~25, some of them are attracted to the metal frame 3, adhere to the surface of the adhesive substance 9, and are fixed semi-permanently, and some of them are attached to the electrodes 22~ on the surface of the pellicle membrane 5. It attaches to the area facing 25. On the other hand, things with a negative charge18
Similarly, on the surface of the pellicle film 5, the electrode 2
It attaches to the area facing 1.
次に同図bに示すように、極性連続切換装置3
0により電極22の極性を逆にし他はそのままに
しておくと、ペリクル膜5の表面のうち電極22
に面する領域に付着していた正の電荷を帯びた異
物17は、粘着性物質9の表面上に付着し半永久
的に固定されたり、あるいはペリクル膜5の表面
のうち電極23〜25に面する領域に付着する。
同様にして電極23〜25の極性を次々と外周方
向に向かつて逆転させていくと、最終的に同図c
に示すように正の電荷を帯びた異物17は、全て
粘着性物質9の表面上に付着し半永久的に固定さ
れる。 Next, as shown in FIG. b, the polarity continuous switching device 3
When the polarity of the electrode 22 is reversed by 0 and the others are left as is, the electrode 22 on the surface of the pellicle membrane 5
The positively charged foreign matter 17 attached to the region facing the pellicle film 5 may be attached to the surface of the adhesive substance 9 and fixed semi-permanently, or may be attached to the surface of the pellicle membrane 5 facing the electrodes 23 to 25. It sticks to the area.
Similarly, if the polarities of the electrodes 23 to 25 are successively directed toward the outer circumferential direction and then reversed, the final result will be c.
As shown in the figure, all of the positively charged foreign substances 17 adhere to the surface of the adhesive substance 9 and are fixed semi-permanently.
一方、この時点で負の電荷を帯びた異物18
は、同図cに示すようにペリクル膜5の全面に付
着している。そこで第8図aに示すように、電極
11すなわち金属枠3及び電極21の極性を逆に
すると、ペリクル膜5の表面のうち電極21に面
する領域に付着していた負の電荷を帯びた異物1
8は、金属枠3に引き寄せられ粘着性物質9の表
面上に付着し半永久的に固定されたり、あるいは
ペリクル膜5の表面のうち電極22〜25に面す
る領域に付着する。次に同図bに示すように、電
極22の極性を逆にし他はそのままにしておく
と、同様にペリクル膜5の表面のうち電極22に
面する領域に付着していた負の電荷を帯びた異物
18は、粘着性物質9の表面上に半永久的に固定
されたり、あるいはペリクル膜5の表面のうち電
極23〜25に面する領域に付着する。同様にし
て電極23〜25の極性を次々と外周方向に向か
つて逆転させていくと、最終的に同図cに示すよ
うに負の電荷を帯びた異物18は、総て粘着性物
質9の表面上に付着し半永久的に固定される。以
上の動作により、空間6内に存在する正及び負の
帯電微小異物17及び18を全て粘着性物質9の
表面上に半永久的に固定させることができる。 On the other hand, at this point, the negatively charged foreign object 18
is attached to the entire surface of the pellicle film 5, as shown in FIG. Therefore, as shown in FIG. 8a, by reversing the polarity of the electrode 11, that is, the metal frame 3, and the electrode 21, the negative charge attached to the area of the surface of the pellicle membrane 5 facing the electrode 21 is removed. Foreign object 1
8 is attracted to the metal frame 3 and adheres to the surface of the adhesive substance 9 and is fixed semi-permanently, or it adheres to the area of the surface of the pellicle membrane 5 facing the electrodes 22 to 25. Next, as shown in Figure b, if the polarity of the electrode 22 is reversed and the others are left as is, the negative charge attached to the area of the surface of the pellicle membrane 5 facing the electrode 22 will be charged. The foreign matter 18 is semi-permanently fixed on the surface of the adhesive substance 9 or attached to a region of the surface of the pellicle membrane 5 facing the electrodes 23 to 25. In the same way, when the polarities of the electrodes 23 to 25 are successively turned toward the outer circumferential direction and reversed, all the negatively charged foreign matter 18 is finally removed from the adhesive substance 9, as shown in FIG. It is attached to the surface and fixed semi-permanently. By the above operation, all the positively and negatively charged minute foreign objects 17 and 18 existing in the space 6 can be fixed semi-permanently on the surface of the adhesive substance 9.
上記の作用において、同心状に構成した電極2
1〜25のうち、隣接する2個の電極間の距離が
短かいので、印加電圧に比して大きいクーロン力
を得ることができ、帯電微小異物の固定が確実に
行なわれる。 In the above action, the electrodes 2 configured concentrically
Since the distance between two adjacent electrodes among Nos. 1 to 25 is short, a Coulomb force larger than the applied voltage can be obtained, and the charged minute foreign matter can be reliably fixed.
以上詳述したように、本発明方法によればペリ
クル膜と透明基板との間の空間内に混入して封入
されてしまつた微小な異物を固定して無害にする
ことができる。また本発明の装置によれば上記の
本発明方法を容易に実施してその効果を充分に発
揮させることができる。
As described in detail above, according to the method of the present invention, minute foreign matter that has entered and been encapsulated in the space between the pellicle film and the transparent substrate can be fixed and rendered harmless. Further, according to the apparatus of the present invention, the above-described method of the present invention can be easily carried out and its effects can be fully exhibited.
第1図は、ペリクル膜を装着した透明基板を示
す斜視図、第2図は、ペリクル膜上及び金属枠表
面に付着した帯電微小異物の挙動を示す説明図、
第3図a,b及び第4図a,b,c,dはそれぞ
れ本発明装置の構成及び本発明方法の作用、効果
を説明する為の、一実施例の断面図、第5図a,
bは同じく、上記と異なる実施例の断面図、第6
図aは上記と異なる実施例の平面図、同図bは同
じく断面図である。第7図a〜c及び第8図a〜
cは第6図a,bに示した実施例の作用を説明す
るための断面図である。
1……透明基板、3……金属枠、5……ペリク
ル膜、9……粘着性物質、11,12,19〜2
5……電極、13,26〜29……絶縁性物質、
14……極性切換装置、30……極性連続切換装
置、15……高圧電源。
FIG. 1 is a perspective view showing a transparent substrate equipped with a pellicle film, and FIG. 2 is an explanatory diagram showing the behavior of charged minute foreign matter adhering to the pellicle film and the surface of the metal frame.
3 a, b and 4 a, b, c, d are sectional views of one embodiment for explaining the structure of the device of the present invention and the operation and effects of the method of the present invention, and FIG. 5 a,
Similarly, b is a cross-sectional view of an embodiment different from the above, and the sixth
Figure a is a plan view of an embodiment different from the above, and figure b is a sectional view of the same. Figure 7 a-c and Figure 8 a-
FIG. 6c is a sectional view for explaining the operation of the embodiment shown in FIGS. 6a and 6b. 1... Transparent substrate, 3... Metal frame, 5... Pellicle film, 9... Adhesive substance, 11, 12, 19-2
5... Electrode, 13,26-29... Insulating material,
14...Polarity switching device, 30...Polarity continuous switching device, 15...High voltage power supply.
Claims (1)
覆つて異物の付着を防止する方法において、上記
金属枠の内面に予め粘着性物質の薄膜を設けてお
き、ペリクル膜と透明基板との間に混入した微小
な異物が浮遊した場合、この微小異物を前記の粘
着性物質に付着せしめて固定し、該微小異物を無
害化することを特徴とする異物固定方法。 2 前記のペリクル膜で覆つた透明基板を電界中
に位置せしめ、前記の微小異物をクーロン力によ
つて金属枠に引きつけ前記の粘着性物質に付着せ
しめて固定し該微小異物を無害化することを特徴
とする特許請求の範囲第1項に記載の異物固定方
法。 3 金属枠で支障したペリクル膜によつて透明基
板を覆つた異物付着防止構造において、上記の金
属枠の内面に粘着性物質の薄膜を設けて、ペリク
ル膜と透明基板との間に混入した微小異物が浮遊
した際、該微小異物を粘着性物質の薄膜に付着せ
しめ、これを固定して微小異物を無害化し得べく
為したることを特徴とする異物固定装置。 4 前記の金属枠で支承したペリクル膜は、電界
を印加する手段を備えたものであることを特徴と
する特許請求の範囲第3項に記載の異物固定装
置。[Claims] 1. In a method of covering a transparent substrate with a pellicle film supported on a metal frame to prevent the adhesion of foreign matter, a thin film of an adhesive substance is previously provided on the inner surface of the metal frame, and the pellicle film and A method for fixing foreign matter, characterized in that, when a minute foreign matter is floating between the transparent substrate and the transparent substrate, the minute foreign matter is fixed by being attached to the adhesive substance, thereby making the minute foreign matter harmless. 2. Positioning the transparent substrate covered with the pellicle film in an electric field, attracting the minute foreign matter to the metal frame by Coulomb force and fixing it on the sticky substance, rendering the minute foreign matter harmless. A method for fixing foreign matter according to claim 1, characterized in that: 3. In a foreign matter adhesion prevention structure in which a transparent substrate is covered with a pellicle film that is obstructed by a metal frame, a thin film of an adhesive substance is provided on the inner surface of the metal frame to prevent minute particles that have entered between the pellicle film and the transparent substrate. A foreign matter fixing device characterized in that, when a foreign matter floats, the minute foreign matter is attached to a thin film of an adhesive substance, and this is fixed to render the minute foreign matter harmless. 4. The foreign object fixing device according to claim 3, wherein the pellicle membrane supported by the metal frame is provided with means for applying an electric field.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58165076A JPS6057841A (en) | 1983-09-09 | 1983-09-09 | Method and device for foreign matter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58165076A JPS6057841A (en) | 1983-09-09 | 1983-09-09 | Method and device for foreign matter |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6057841A JPS6057841A (en) | 1985-04-03 |
JPS63777B2 true JPS63777B2 (en) | 1988-01-08 |
Family
ID=15805407
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58165076A Granted JPS6057841A (en) | 1983-09-09 | 1983-09-09 | Method and device for foreign matter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6057841A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0779551A2 (en) | 1995-12-15 | 1997-06-18 | Shin-Etsu Chemical Co., Ltd. | Frame-supported dustproof pellicle for photolithographic photomask |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61137948U (en) * | 1985-02-19 | 1986-08-27 | ||
JP2642637B2 (en) * | 1987-08-18 | 1997-08-20 | 三井石油化学工業 株式会社 | Dustproof film |
JP2535971B2 (en) * | 1987-11-05 | 1996-09-18 | 三井石油化学工業株式会社 | Pellicle |
JPH01103305U (en) * | 1987-12-28 | 1989-07-12 | ||
JP3434731B2 (en) | 1999-06-09 | 2003-08-11 | Necエレクトロニクス株式会社 | Pellicle and its case |
NL2024289B1 (en) * | 2018-11-27 | 2020-09-25 | Asml Netherlands Bv | Membrane cleaning apparatus |
KR20220079655A (en) * | 2019-12-13 | 2022-06-13 | 미쯔이가가꾸가부시끼가이샤 | A method for demounting a pellicle, and an apparatus for demounting a pellicle |
KR20230017807A (en) | 2020-06-04 | 2023-02-06 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Pellicle frame, pellicle, exposure original plate with pellicle, exposure method, semiconductor manufacturing method, and liquid crystal display panel manufacturing method |
-
1983
- 1983-09-09 JP JP58165076A patent/JPS6057841A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0779551A2 (en) | 1995-12-15 | 1997-06-18 | Shin-Etsu Chemical Co., Ltd. | Frame-supported dustproof pellicle for photolithographic photomask |
Also Published As
Publication number | Publication date |
---|---|
JPS6057841A (en) | 1985-04-03 |
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