JPS6377670U - - Google Patents
Info
- Publication number
- JPS6377670U JPS6377670U JP17074586U JP17074586U JPS6377670U JP S6377670 U JPS6377670 U JP S6377670U JP 17074586 U JP17074586 U JP 17074586U JP 17074586 U JP17074586 U JP 17074586U JP S6377670 U JPS6377670 U JP S6377670U
- Authority
- JP
- Japan
- Prior art keywords
- rotary table
- locking edge
- fixed pins
- mounting section
- protective washer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims 2
- 241000255777 Lepidoptera Species 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17074586U JPS6377670U (enExample) | 1986-11-06 | 1986-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17074586U JPS6377670U (enExample) | 1986-11-06 | 1986-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6377670U true JPS6377670U (enExample) | 1988-05-23 |
Family
ID=31105746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17074586U Pending JPS6377670U (enExample) | 1986-11-06 | 1986-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6377670U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017017207A (ja) * | 2015-07-02 | 2017-01-19 | 株式会社ディスコ | ウェーハ保持装置 |
-
1986
- 1986-11-06 JP JP17074586U patent/JPS6377670U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017017207A (ja) * | 2015-07-02 | 2017-01-19 | 株式会社ディスコ | ウェーハ保持装置 |