JPS6377670U - - Google Patents

Info

Publication number
JPS6377670U
JPS6377670U JP17074586U JP17074586U JPS6377670U JP S6377670 U JPS6377670 U JP S6377670U JP 17074586 U JP17074586 U JP 17074586U JP 17074586 U JP17074586 U JP 17074586U JP S6377670 U JPS6377670 U JP S6377670U
Authority
JP
Japan
Prior art keywords
rotary table
locking edge
fixed pins
mounting section
protective washer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17074586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17074586U priority Critical patent/JPS6377670U/ja
Publication of JPS6377670U publication Critical patent/JPS6377670U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP17074586U 1986-11-06 1986-11-06 Pending JPS6377670U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17074586U JPS6377670U (enrdf_load_stackoverflow) 1986-11-06 1986-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17074586U JPS6377670U (enrdf_load_stackoverflow) 1986-11-06 1986-11-06

Publications (1)

Publication Number Publication Date
JPS6377670U true JPS6377670U (enrdf_load_stackoverflow) 1988-05-23

Family

ID=31105746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17074586U Pending JPS6377670U (enrdf_load_stackoverflow) 1986-11-06 1986-11-06

Country Status (1)

Country Link
JP (1) JPS6377670U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017017207A (ja) * 2015-07-02 2017-01-19 株式会社ディスコ ウェーハ保持装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017017207A (ja) * 2015-07-02 2017-01-19 株式会社ディスコ ウェーハ保持装置

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