JPS6377655A - Polishing device - Google Patents
Polishing deviceInfo
- Publication number
- JPS6377655A JPS6377655A JP61224279A JP22427986A JPS6377655A JP S6377655 A JPS6377655 A JP S6377655A JP 61224279 A JP61224279 A JP 61224279A JP 22427986 A JP22427986 A JP 22427986A JP S6377655 A JPS6377655 A JP S6377655A
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- bodies
- pressure
- polished
- drive shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 63
- 239000013013 elastic material Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 abstract description 8
- 239000006061 abrasive grain Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
Description
【発明の詳細な説明】 磨装置に関するものである。[Detailed description of the invention] This relates to polishing equipment.
従来の自動研磨装置では、複雑なうねりなどの形状を有
する表面を研磨する場合、研1声部を研磨表面に沿わせ
て移動させるために、あらかじめ表面形状を制御装置に
覚えこませておく必要があった。With conventional automatic polishing equipment, when polishing a surface with a complex shape such as undulations, it is necessary to memorize the surface shape in advance in the control device in order to move the polishing part along the polishing surface. was there.
本発明の目的は、従来のような表面形状を一度覚えこま
せる手間を省き、精密な研磨面と簡単な動作で得ること
ができる研磨装置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a polishing device that can obtain a precisely polished surface with simple operations without requiring the conventional effort to memorize the surface shape once.
本発明によ牡ば、物体の表面を研磨する複数個ノ研磨体
(6)’e、そnぞn9弾性材(7) ’!il−介し
て、駆動軸(2)に取り付け、該弾性材のそれぞれに、
そのたわみを検出するセンサ(8)を取り付け、各弾性
材のたわみ状態を変化させることができる機構体(10
及び11)を、前記弾性材毎に設け、各研磨体が前記物
体に接触して研l5シている時間内の前記センサの出力
を受け。According to the present invention, a plurality of abrasive bodies (6)'e and nine elastic members (7)' are used to polish the surface of an object. il- attached to the drive shaft (2) through each of the elastic members,
A sensor (8) that detects the deflection is attached to a mechanism (10) that can change the deflection state of each elastic material.
and 11) are provided for each of the elastic materials, and receive the output of the sensor during the time when each polishing body is in contact with and polishing the object.
各研磨体の各研1g面の圧力が所定値に保たれるように
、前記機構体?制御する制御装置(4)を有すること全
特徴とする研磨装置が得らする。The mechanical body? A polishing apparatus is obtained which is characterized in that it has a control device (4) for controlling the polishing apparatus.
即ち2本発明は、研磨体の研磨面圧力を個別に検知する
ために9弾性材7のそ扛ぞnにセンサを設け、こnらセ
ンサ出力を受けた制御装置によって制御さ扛る機構体が
弾性材を個別に操作して各研磨体の各研磨面圧力を所定
値に保つことを特徴とする。That is, in the present invention, a sensor is provided on the slope of the elastic member 7 in order to individually detect the polishing surface pressure of the polishing body, and the mechanism is controlled by a control device that receives the sensor output. is characterized in that the pressure on each polishing surface of each polishing body is maintained at a predetermined value by individually operating the elastic members.
以下1本発明の一実施例を図面を参照して説明する。 An embodiment of the present invention will be described below with reference to the drawings.
第6図は本発明の一実施例による研磨装置を示す図であ
る。第6図は本研磨装置でボンベ状の被研磨物5の内面
を研磨する例で、1は第1図及び第2図を用いて後述す
る研磨部であり。FIG. 6 is a diagram showing a polishing apparatus according to an embodiment of the present invention. FIG. 6 shows an example in which the present polishing apparatus polishes the inner surface of a cylinder-shaped object to be polished 5, and numeral 1 denotes a polishing section which will be described later with reference to FIGS. 1 and 2.
研磨部1は、制御装置4によって制御さ【る駆動装置乙
の駆動軸2によって、支持、駆動さnる。研磨部1は回
転連動と軸方向の直線運動を行い得る。又、駆動装置5
部も上下方向に移動できるようにすることによって、研
磨部内の機構体だけでは対処できないような大きな形状
変化にも追従できる。The polishing section 1 is supported and driven by a drive shaft 2 of a drive device B which is controlled by a control device 4. The polishing section 1 can perform rotational interlocking and linear movement in the axial direction. Moreover, the drive device 5
By making the part movable in the vertical direction, it is possible to follow large changes in shape that cannot be handled by the mechanism within the polishing part alone.
研磨部1の詳細?第1図及び第2図に示す。Details of polishing section 1? Shown in FIGS. 1 and 2.
第1図及び第2図を参照して、6が研磨体であり、固定
砥粒による研磨の場合は砥石に相当し。Referring to FIGS. 1 and 2, 6 is a polishing body, which corresponds to a grindstone in the case of polishing with fixed abrasive grains.
ラッピングのような遊離砥粒による研磨の場合はラップ
等に相当する。7が研磨体6を支持しているパ羊定数の
大きいバネ材(即ち2弾性材)であシ、このバネ材7に
貼ったストレーンゲージ8(こ扛が、各弾性体7のたわ
みを検出するセンサに相当する)によって間接的に各研
磨体6の研磨面圧力を検出し、制御装置4へ出力する。Polishing using free abrasive grains, such as lapping, corresponds to lapping. 7 is a spring material with a large Pamph constant (i.e., 2 elastic materials) that supports the polishing body 6, and a strain gauge 8 (this gauge detects the deflection of each elastic body 7) is attached to this spring material 7. The polishing surface pressure of each polishing body 6 is indirectly detected by a sensor (corresponding to a sensor) and output to the control device 4.
研磨体6は断続的に研磨を行うため、その研磨面圧力も
変動するので、軸2の回転角を常に読みとりながら、そ
れぞnの研磨体6が実際に研磨している回転角の時のみ
検出するようにする。9は、断続研磨によってバネ材が
振動を起すのを防ぐためのダンパーである。第6図のよ
うに被研磨物5の内面がうねっていると1例えば第6図
のAからBへ研磨部1が移動すると研磨面圧力が下り、
バネ材7に貼ったストレーンゲージ8が変形する。この
変形をブリッジ回路を組んで電圧の変化に変換して、制
御装置4は、該変換された電圧源の所定値からの差を算
出し、アクチュエーター10へ駆動命令を出し。Since the polishing body 6 performs polishing intermittently, the pressure on its polishing surface also fluctuates, so while constantly reading the rotation angle of the shaft 2, only when the rotation angle is at which each n polishing body 6 is actually polishing. Make it detectable. 9 is a damper for preventing the spring material from vibrating due to intermittent polishing. If the inner surface of the object to be polished 5 is undulating as shown in FIG. 6, for example, when the polishing section 1 moves from A to B in FIG. 6, the pressure on the polishing surface decreases.
The strain gauge 8 attached to the spring material 7 is deformed. This deformation is converted into a change in voltage by constructing a bridge circuit, and the control device 4 calculates the difference of the converted voltage source from a predetermined value and issues a drive command to the actuator 10.
台形カム11をバネ材7の下へ押し込ませて。Push the trapezoidal cam 11 under the spring material 7.
研磨面圧力を所定値に保つ。各研磨体はそnぞれ独立に
検出・駆動さnるので、初めに研磨体をドレッシングし
て一様な形状にしても不等摩耗を起こすような場合でも
安全である。Maintain the polishing surface pressure at a specified value. Since each polishing body is detected and driven independently, it is safe even in cases where uneven wear occurs even if the polishing bodies are first dressed to have a uniform shape.
以上述べたように5本発明によれば、各研磨体の研磨面
の圧力を所定値に保ちながら研磨できるような機構を持
つ研磨装置によって測定の困雌な複雑な形状を持つ表面
でも簡単に均一な研磨面が得られる。円筒等の内面を研
磨する場合、研磨部の回転軸を被研磨物の中心からオフ
セットして、被研磨物をゆっくりと回転させれば、断面
形状が円でなく、場所によってRが違っているような形
でも簡単に研磨できる。As described above, according to the present invention, even surfaces with complex shapes that are difficult to measure can be easily polished using a polishing device that has a mechanism that allows polishing while maintaining the pressure on the polishing surface of each polishing body at a predetermined value. A uniformly polished surface can be obtained. When polishing the inner surface of a cylinder, etc., if you offset the rotation axis of the polishing part from the center of the object to be polished and rotate the object slowly, the cross-sectional shape will not be circular and the radius will differ depending on the location. It can be easily polished even in shapes like this.
第1図及び第2図は、そnぞn1本発明の一用例分示し
た図である。
1:研磨部、2:軸、6:駆動装置、4:制御装置、5
:被研磨物、6:研磨体、7:バ不材、8ニストレーン
ゲージ、9:ダンパー。
10ニアクチユニーター、11:台形カム。FIGS. 1 and 2 are diagrams showing one example of the use of the present invention. 1: Polishing section, 2: Axis, 6: Drive device, 4: Control device, 5
: Polished object, 6: Polishing body, 7: Bar stock, 8 Ni strain gauge, 9: Damper. 10 near actuator, 11: trapezoidal cam.
Claims (1)
、弾性材を介して、駆動軸に取り付け、該弾性材のそれ
ぞれに、そのたわみを検出するセンサを取り付け、各弾
性材のたわみ状態を変化させることができる機構体を、
前記弾性材毎に設け、各研磨体が前記物体に接触して研
磨している時間内の前記センサの出力を受け、各研磨体
の各研磨面の圧力が所定値に保たれるように、前記機構
体を制御する制御装置を有することを特徴とする研磨装
置。1. A plurality of polishing bodies for polishing the surface of an object are each attached to the drive shaft via an elastic material, and a sensor is attached to each of the elastic materials to detect the deflection of the deflection state of each elastic material. A mechanism that can change the
provided for each of the elastic materials so that the pressure on each polishing surface of each polishing body is maintained at a predetermined value by receiving the output of the sensor during the time when each polishing body is in contact with the object and polishing; A polishing apparatus comprising a control device for controlling the mechanism.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61224279A JPS6377655A (en) | 1986-09-22 | 1986-09-22 | Polishing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61224279A JPS6377655A (en) | 1986-09-22 | 1986-09-22 | Polishing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6377655A true JPS6377655A (en) | 1988-04-07 |
JPH0440153B2 JPH0440153B2 (en) | 1992-07-01 |
Family
ID=16811281
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61224279A Granted JPS6377655A (en) | 1986-09-22 | 1986-09-22 | Polishing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6377655A (en) |
-
1986
- 1986-09-22 JP JP61224279A patent/JPS6377655A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0440153B2 (en) | 1992-07-01 |
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