JPH0440153B2 - - Google Patents
Info
- Publication number
- JPH0440153B2 JPH0440153B2 JP61224279A JP22427986A JPH0440153B2 JP H0440153 B2 JPH0440153 B2 JP H0440153B2 JP 61224279 A JP61224279 A JP 61224279A JP 22427986 A JP22427986 A JP 22427986A JP H0440153 B2 JPH0440153 B2 JP H0440153B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- pressure
- polished
- elastic
- deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 claims description 56
- 239000013013 elastic material Substances 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 description 6
- 239000006061 abrasive grain Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は表面研磨装置に係り、特に、自動研磨
装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a surface polishing device, and particularly to an automatic polishing device.
従来の自動研磨装置では、複雑なうねりなどの
形状を有する表面を研磨する場合、研磨部を研磨
表面に沿わせて移動させるために、あらかじめ表
面形状を制御装置に覚えこませておく必要があつ
た。
With conventional automatic polishing equipment, when polishing a surface with a complex shape such as undulations, it is necessary to memorize the surface shape in advance in the control device in order to move the polishing part along the polishing surface. Ta.
本発明の目的は、従来のような表面形状を一度
覚えこませる手間を省き、精密な研磨面を簡単な
動作で得ることができる研磨装置を提供すること
にある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a polishing device that can obtain a precisely polished surface with simple operations without the need to memorize the surface shape as in the past.
本発明によれば、物体の表面を研磨する複数個
の研磨体6を、それぞれ、弾性材7を介して、駆
動軸2に取り付け、該弾性材のそれぞれに、その
たわみを検出するセンサ8を取り付け、各弾性材
のたわみ状態を変化させることができる機構体
(10及び11)を、前記弾性材毎に設け、各研
磨体が前記物体に接触して研磨している時間内の
前記センサの出力を受け、各研磨体の各研磨面の
圧力が所定値に保たれるように、前記機構体を制
御する制御装置4を有することを特徴とする研磨
装置が得られる。
According to the present invention, a plurality of polishing bodies 6 for polishing the surface of an object are each attached to the drive shaft 2 via an elastic member 7, and a sensor 8 for detecting the deflection of each of the elastic members is provided. Mechanisms (10 and 11) capable of changing the deflection state of each elastic material are provided for each of the elastic materials, and each polishing body contacts the object to polish the sensor. There is obtained a polishing apparatus characterized in that it has a control device 4 which receives the output and controls the mechanism so that the pressure on each polishing surface of each polishing body is maintained at a predetermined value.
即ち、本発明は、研磨体の研磨面圧力を個別に
検知するために、弾性材7のそれぞれにセンサを
設け、これらセンサ出力を受けた制御装置によつ
て制御される機構体が弾性体を個別に操作して各
研磨体の各研磨面圧力を所定値に保つことを特徴
とする。 That is, in the present invention, in order to individually detect the polishing surface pressure of the polishing body, a sensor is provided in each of the elastic members 7, and a mechanism controlled by a control device that receives the outputs of these sensors detects the pressure of the polishing surface of the polishing body. It is characterized in that each polishing surface pressure of each polishing body is maintained at a predetermined value by individual operation.
以下、本発明の一実施例を図面を参照して説明
する。
Hereinafter, one embodiment of the present invention will be described with reference to the drawings.
第3図は本発明の一実施例による研磨装置を示
す図である。第3図は本研磨装置でボンベ状の被
研磨物5の内面を研磨する例で、1は第1図及び
第2図を用いて後述する研磨部であり、研磨部1
は、制御装置4によつて制御される駆動装置3の
駆動軸2によつて、支持、駆動される。研磨部1
は回転運動と軸方向の直線運動を行い得る。又、
駆動装置3部も上下方向に移動できるようにする
ことによつて、研磨部内の機構体だけでは対処で
きないような大きな形状変化にも追従できる。 FIG. 3 is a diagram showing a polishing apparatus according to an embodiment of the present invention. FIG. 3 shows an example of polishing the inner surface of a cylinder-shaped object 5 to be polished using this polishing apparatus.
is supported and driven by a drive shaft 2 of a drive device 3 controlled by a control device 4. Polishing part 1
can perform rotational motion and axial linear motion. or,
By making the driving device 3 movable in the vertical direction, it is possible to follow large changes in shape that cannot be handled by the mechanism within the polishing section alone.
研磨部1の詳細を第1図及び第2図に示す。第
1図及び第2図を参照して、6が研磨体であり、
固定砥粒による研磨の場合は砥石に相当し、ラツ
ピングのような遊離砥粒による研磨の場合はラツ
プ等に相当する。7が研磨体6を支持しているバ
ネ定数の大きいバネ材(即ち、弾性材)であり、
このバネ材7に貼つたストレーンゲージ8(これ
が、各弾性体7のたわみを検出するセンサに相当
する)によつて間接的に各研磨体6の研磨面圧力
を検出し、制御装置4へ出力する。研磨体6は断
続的に研磨を行うため、その研磨面圧力も変動す
るので、軸2の回転角を常に読みとりながら、そ
れぞれの研磨体6が実際に研磨している回転角の
時のみ検出するようにする。9は、断続研磨によ
つてバネ材が振動を起すのを防ぐためのダンパー
である。第3図のように被研磨物5の内面がうね
つていると、例えば第3図のAからBへ研磨部1
が移動すると研磨面圧力が下り、バネ材7に貼つ
たストレーンゲージ8が変形する。この変形をブ
リツジ回路を組んで電圧の変化に変換して、制御
装置4は、該変換された電圧値の所定値からの差
を算出し、アクチユエーター10へ駆動命令を出
し、台形カム11をバネ材7の下へ押し込ませ
て、研磨面圧力を所定値に保つ。各研磨体はそれ
ぞれ独立に検出・駆動されるので、初めに研磨体
をドレツシングして一様な形状にしても不等摩耗
を起こすような場合でも安全である。 Details of the polishing section 1 are shown in FIGS. 1 and 2. With reference to FIGS. 1 and 2, 6 is a polishing body,
In the case of polishing with fixed abrasive grains, it corresponds to a grindstone, and in the case of polishing with free abrasive grains such as lapping, it corresponds to a lapping. 7 is a spring material with a large spring constant (i.e., an elastic material) supporting the polishing body 6;
A strain gauge 8 attached to this spring material 7 (this corresponds to a sensor that detects the deflection of each elastic body 7) indirectly detects the polishing surface pressure of each polishing body 6 and outputs it to the control device 4. do. Since the polishing body 6 performs polishing intermittently, the pressure on its polishing surface also fluctuates, so while constantly reading the rotation angle of the shaft 2, it is detected only when the rotation angle is at which each polishing body 6 is actually polishing. Do it like this. 9 is a damper for preventing the spring material from vibrating due to intermittent polishing. If the inner surface of the object to be polished 5 is undulating as shown in FIG.
When the is moved, the pressure on the polishing surface decreases, and the strain gauge 8 attached to the spring material 7 is deformed. This deformation is converted into a change in voltage by constructing a bridge circuit, and the control device 4 calculates the difference between the converted voltage value and a predetermined value, issues a drive command to the actuator 10, and sends a drive command to the trapezoidal cam 11. is pushed under the spring material 7 to maintain the polishing surface pressure at a predetermined value. Since each abrasive body is detected and driven independently, it is safe even if the abrasive body is first dressed into a uniform shape, but uneven wear occurs.
以上述べたように、本発明によれば、各研磨体
の研磨面の圧力を所定値に保ちながら研磨できる
ような機構を持つ研磨装置によつて測定の困難な
複雑な形状を持つ表面でも簡単に均一な研磨面が
得られる。円筒等の内面を研磨する場合、研磨部
の回転軸を被研磨物の中心からオフセツトして、
被研磨物をゆつくりと回転させれば、断面形状が
円でなく、場所によつてRが違つているような形
でも簡単に研磨できる。
As described above, according to the present invention, even surfaces with complex shapes that are difficult to measure can be easily polished using a polishing device that has a mechanism that allows polishing while maintaining the pressure on the polishing surface of each polishing body at a predetermined value. A uniformly polished surface can be obtained. When polishing the inner surface of a cylinder, etc., offset the rotating shaft of the polishing section from the center of the object to be polished.
If the object to be polished is rotated slowly, it can be easily polished even if the cross-sectional shape is not circular and the radius differs depending on the location.
第1図及び第2図は、それぞれ、本発明の一実
施例による円筒状物体の内面研磨装置の断面図及
び側面図、第3図は第1図の研磨装置の使用例を
示した図である。
1……研磨部、2……軸、3……駆動装置、4
……制御装置、5……被研磨物、6……研磨体、
7……バネ材、8……ストレーンゲージ、9……
ダンパー、10……アクチユエーター、11……
台形カム。
1 and 2 are a sectional view and a side view, respectively, of an apparatus for polishing the inner surface of a cylindrical object according to an embodiment of the present invention, and FIG. 3 is a diagram showing an example of use of the polishing apparatus of FIG. 1. be. 1... Polishing section, 2... Shaft, 3... Drive device, 4
...control device, 5 ... object to be polished, 6 ... polishing body,
7... Spring material, 8... Strain gauge, 9...
Damper, 10... Actuator, 11...
Trapezoidal cam.
Claims (1)
れぞれ、弾性材を介して、駆動軸に取り付け、該
弾性材のそれぞれに、そのたわみを検出するセン
サを取り付け、各弾性材のたわみ状態を変化させ
ることができる機構体を、前記弾性材毎に設け、
各研磨体が前記物体に接触して研磨している時間
内の前記センサの出力を受け、各研磨体の各研磨
面の圧力が所定値に保たれるように、前記機構体
を制御する制御装置を有することを特徴とする研
磨装置。1. A plurality of abrasive bodies for polishing the surface of an object are each attached to a drive shaft via an elastic material, a sensor is attached to each of the elastic materials to detect the deflection, and the state of deflection of each elastic material is measured. A mechanism that can be changed is provided for each of the elastic materials,
Control for controlling the mechanical body so that the pressure on each polishing surface of each polishing body is maintained at a predetermined value based on the output of the sensor during the time when each polishing body is in contact with and polishing the object. A polishing device comprising a polishing device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61224279A JPS6377655A (en) | 1986-09-22 | 1986-09-22 | Polishing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61224279A JPS6377655A (en) | 1986-09-22 | 1986-09-22 | Polishing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6377655A JPS6377655A (en) | 1988-04-07 |
JPH0440153B2 true JPH0440153B2 (en) | 1992-07-01 |
Family
ID=16811281
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61224279A Granted JPS6377655A (en) | 1986-09-22 | 1986-09-22 | Polishing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6377655A (en) |
-
1986
- 1986-09-22 JP JP61224279A patent/JPS6377655A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6377655A (en) | 1988-04-07 |
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