JPS637667U - - Google Patents
Info
- Publication number
- JPS637667U JPS637667U JP9976286U JP9976286U JPS637667U JP S637667 U JPS637667 U JP S637667U JP 9976286 U JP9976286 U JP 9976286U JP 9976286 U JP9976286 U JP 9976286U JP S637667 U JPS637667 U JP S637667U
- Authority
- JP
- Japan
- Prior art keywords
- coupler
- entrance
- exit
- fitting
- abutting surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims 1
- 239000011247 coating layer Substances 0.000 description 1
Landscapes
- Closures For Containers (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986099762U JPH0417507Y2 (enExample) | 1986-06-28 | 1986-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986099762U JPH0417507Y2 (enExample) | 1986-06-28 | 1986-06-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS637667U true JPS637667U (enExample) | 1988-01-19 |
| JPH0417507Y2 JPH0417507Y2 (enExample) | 1992-04-20 |
Family
ID=30968944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986099762U Expired JPH0417507Y2 (enExample) | 1986-06-28 | 1986-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0417507Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014082250A (ja) * | 2012-10-15 | 2014-05-08 | Tokyo Electron Ltd | ガス導入装置及び誘導結合プラズマ処理装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1035684A1 (nl) * | 2007-07-23 | 2009-01-27 | Asml Netherlands Bv | Small Volume Resist Dispenser. |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS489885U (enExample) * | 1971-06-16 | 1973-02-03 |
-
1986
- 1986-06-28 JP JP1986099762U patent/JPH0417507Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS489885U (enExample) * | 1971-06-16 | 1973-02-03 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014082250A (ja) * | 2012-10-15 | 2014-05-08 | Tokyo Electron Ltd | ガス導入装置及び誘導結合プラズマ処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0417507Y2 (enExample) | 1992-04-20 |