JPS6376344A - Integrated circuit tester - Google Patents

Abstract

PURPOSE:To eliminate the need to input a command related to a test program, to improve the operating efficiency and the processing efficiency and to prevent an input error by an operator by a method wherein a tester's computer receives the information related to the test program through a wafer prober or an autohandler. CONSTITUTION:The test-program-related information 400 existing at a wafer prober 300 is transmitted by an interface circuit 201 to a tester's computer 200 via an interconnecting line 203. After the test-program-related information has been decoded by a control program 202, it is executed. Through this constitution, if the designation of a test program is to be changed, a command to execute the change can be incorporated in the test-program-related information 400 at the wafer prober 300, and the change can be executed automatically by inputting the command to change the designation of the program through an ordinary keyboard by means of the control program 202 for the tester's computer 200.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an integrated circuit testing device, and particularly to an integrated circuit testing device that is used in combination with a wafer prober or autohandler, receives test program information from the wafer prober or autohandler, and processes this information. [Prior art] Regarding integrated circuit testing equipment that automatically reads test programs, etc., in conventional integrated circuit testing equipment, in order to read the test I program and change the program name, the operator must These instructions are inputted from an input device attached to the tester computer, such as a keyboard such as a CRT.

[While the invention is trying to solve the problem]

In the conventional integrated circuit testing apparatus described above, an operator directly inputs commands into the input device of the tester computer in order to execute the commands. Therefore, there is a problem that the work efficiency is poor and that if there is an error in the input operation itself, the work will be delayed.

[Means for solving problems]

The integrated circuit testing apparatus of the present invention includes an interface means for causing a built-in tester computer to receive test program information from the wafer bus or the autohandler, and an interface means for receiving the test program information from the wafer bus or the autohandler by interrupting the wafer bus or the autohandler. and means for analyzing the instruction and generating an instruction execution trigger.

〔Example〕

Next, embodiments of the present invention will be described with reference to the drawings.

Referring to FIG. 1, which shows a first embodiment of the present invention, an integrated circuit testing apparatus 100 has a tester computer 200 as part of its configuration for controlling functions. This tester computer 200 receives test program information 40 from a wafer blobber (or autohandler) 300.
It has an interface circuit 201 for receiving 0 through the connection line 203t-. Further, the tester computer 200 has a control program 202 for analyzing the command and generating a command execution trigger after receiving the test program information 400 from the wafer blobber 300. Furthermore, the tester computer 200 has an area 204 for storing the D1-program.

As shown in FIG. 2, the control program 202 proceeds to the next step if a command can be input in a step 501 for determining whether or not to input a command, and if an interrupt is detected in a step 502 for determining the presence or absence of an interrupt from the wafer 10-bar 300. If it has occurred, proceed to the next step.

Furthermore, instruction analysis processing 5 is performed from the test program information 400.
03 is performed, and an instruction execution table creation process 504 is performed based on the analysis result. Next, based on the contents of this command execution table, normal control processing 50 performs analysis and execution of commands input from the keyboard, control of the test program, etc.
After executing an instruction execution trigger generation process 505 that transfers the process to the process step 6, the process returns to the control process 506. Note that in step 501 of determining whether or not command input is possible, if the command input cannot be accepted, the process returns to control processing 506. Further, in the step 502 of determining the presence or absence of an interrupt from the wafer brober 300,
If no interrupt has occurred, the process returns to control processing 506.

In this way, the test program information 400 existing on the wafer 10-bar 300 is transferred to the tester computer 20 by the interface circuit 201 through the connection line 203.
0, the test program information is decoded and executed by the control program 202.

In such a configuration of the integrated circuit testing apparatus 100, when it is desired to change the name of the test program to another name, the test program information 400 of the wafer 10-bar 300 includes an instruction to execute it, so that the test program can be changed to a different name. By the control program 202 of 200,
This can be done automatically in the same way as inputting a program name change command from a regular keyboard.

FIG. 3 shows a second embodiment of the present invention, in which a host computer 600 is connected to an integrated circuit testing apparatus 100 via a communication line 700.
connected through. In this configuration, a host computer 600 stores test programs, etc. 3 used in an integrated circuit testing device 100, is connected to a tester computer 200 through a communication line 700, and is commanded to read a test program using test program information 400 from a wafer prober 300. The test program is automatically transferred from the host computer 600 to the test program storage area 2 of the integrated circuit testing equipment 100 by issuing the
04 can be supplied as needed. In this embodiment, since the test program input to the integrated circuit testing apparatus 100 is automated, work efficiency can be further improved and errors in input operations can be prevented.

〔Effect of the invention〕

As explained above, according to the present invention, by receiving information related to the test program from the wafer brober or the autohandler to the tester computer, the test program
Since commands related to the program do not have to be input by keyboard operation, operability and work efficiency can be improved, and input errors by the operator can be prevented. Therefore, work stagnation can be reduced.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing a first embodiment of the present invention, FIG. 2 is a diagram explaining the control program of FIG. 1, and FIG. 3 is a block diagram showing a second embodiment of the present invention. . 100... Integrated circuit testing device, 200... Tester computer, 201... Interface circuit, 2
02... Control program, 203... Connection line, 20
4... Test program storage area, 300... Wafer prober, 400... Test program information. 1st 2nd & So

Claims (1)

[Claims] an interface means for causing a built-in tester computer to receive test program information from either the wafer prober or the autohandler; and an interface means for receiving the test program information from either the wafer prober or the autohandler, analyzing instructions, and executing instructions. An integrated circuit testing device comprising means for generating an execution trigger.