JPS6375033U - - Google Patents
Info
- Publication number
- JPS6375033U JPS6375033U JP16972986U JP16972986U JPS6375033U JP S6375033 U JPS6375033 U JP S6375033U JP 16972986 U JP16972986 U JP 16972986U JP 16972986 U JP16972986 U JP 16972986U JP S6375033 U JPS6375033 U JP S6375033U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- resin layer
- photosensitive resin
- wafer
- spin chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
- 239000007788 liquid Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16972986U JPS6375033U (enExample) | 1986-11-04 | 1986-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16972986U JPS6375033U (enExample) | 1986-11-04 | 1986-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6375033U true JPS6375033U (enExample) | 1988-05-19 |
Family
ID=31103804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16972986U Pending JPS6375033U (enExample) | 1986-11-04 | 1986-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6375033U (enExample) |
-
1986
- 1986-11-04 JP JP16972986U patent/JPS6375033U/ja active Pending