JPS6374267U - - Google Patents
Info
- Publication number
- JPS6374267U JPS6374267U JP1986167053U JP16705386U JPS6374267U JP S6374267 U JPS6374267 U JP S6374267U JP 1986167053 U JP1986167053 U JP 1986167053U JP 16705386 U JP16705386 U JP 16705386U JP S6374267 U JPS6374267 U JP S6374267U
- Authority
- JP
- Japan
- Prior art keywords
- recess
- identification mark
- letter
- symbol
- filled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000012780 transparent material Substances 0.000 claims 1
- 238000005498 polishing Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986167053U JPH0644594Y2 (ja) | 1986-10-30 | 1986-10-30 | セラミック盤 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986167053U JPH0644594Y2 (ja) | 1986-10-30 | 1986-10-30 | セラミック盤 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6374267U true JPS6374267U (US08063081-20111122-C00115.png) | 1988-05-18 |
| JPH0644594Y2 JPH0644594Y2 (ja) | 1994-11-16 |
Family
ID=31098620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986167053U Expired - Lifetime JPH0644594Y2 (ja) | 1986-10-30 | 1986-10-30 | セラミック盤 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644594Y2 (US08063081-20111122-C00115.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01301056A (ja) * | 1988-05-25 | 1989-12-05 | Showa Denko Kk | セラミックス製トッププレート |
| JPH0499829U (US08063081-20111122-C00115.png) * | 1991-02-05 | 1992-08-28 | ||
| WO2007086529A1 (ja) * | 2006-01-25 | 2007-08-02 | Jsr Corporation | 化学機械研磨パッドおよびその製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55105468U (US08063081-20111122-C00115.png) * | 1979-01-17 | 1980-07-23 | ||
| JPS58155168A (ja) * | 1982-03-04 | 1983-09-14 | Fujikoshi Kikai Kogyo Kk | ポリシング用セラミツク定盤の固定装置 |
-
1986
- 1986-10-30 JP JP1986167053U patent/JPH0644594Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55105468U (US08063081-20111122-C00115.png) * | 1979-01-17 | 1980-07-23 | ||
| JPS58155168A (ja) * | 1982-03-04 | 1983-09-14 | Fujikoshi Kikai Kogyo Kk | ポリシング用セラミツク定盤の固定装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01301056A (ja) * | 1988-05-25 | 1989-12-05 | Showa Denko Kk | セラミックス製トッププレート |
| JPH0499829U (US08063081-20111122-C00115.png) * | 1991-02-05 | 1992-08-28 | ||
| WO2007086529A1 (ja) * | 2006-01-25 | 2007-08-02 | Jsr Corporation | 化学機械研磨パッドおよびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0644594Y2 (ja) | 1994-11-16 |
