JPS6373364U - - Google Patents

Info

Publication number
JPS6373364U
JPS6373364U JP16725586U JP16725586U JPS6373364U JP S6373364 U JPS6373364 U JP S6373364U JP 16725586 U JP16725586 U JP 16725586U JP 16725586 U JP16725586 U JP 16725586U JP S6373364 U JPS6373364 U JP S6373364U
Authority
JP
Japan
Prior art keywords
tank
treatment tank
pump
overflow
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16725586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354138Y2 (US07223432-20070529-C00017.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16725586U priority Critical patent/JPH0354138Y2/ja
Publication of JPS6373364U publication Critical patent/JPS6373364U/ja
Application granted granted Critical
Publication of JPH0354138Y2 publication Critical patent/JPH0354138Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP16725586U 1986-10-30 1986-10-30 Expired JPH0354138Y2 (US07223432-20070529-C00017.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16725586U JPH0354138Y2 (US07223432-20070529-C00017.png) 1986-10-30 1986-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16725586U JPH0354138Y2 (US07223432-20070529-C00017.png) 1986-10-30 1986-10-30

Publications (2)

Publication Number Publication Date
JPS6373364U true JPS6373364U (US07223432-20070529-C00017.png) 1988-05-16
JPH0354138Y2 JPH0354138Y2 (US07223432-20070529-C00017.png) 1991-11-28

Family

ID=31099016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16725586U Expired JPH0354138Y2 (US07223432-20070529-C00017.png) 1986-10-30 1986-10-30

Country Status (1)

Country Link
JP (1) JPH0354138Y2 (US07223432-20070529-C00017.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0276229A (ja) * 1988-09-12 1990-03-15 Nec Corp 半導体装置の製造装置
JPH05121392A (ja) * 1991-10-28 1993-05-18 Sharp Corp エツチング等の処理槽

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0276229A (ja) * 1988-09-12 1990-03-15 Nec Corp 半導体装置の製造装置
JPH05121392A (ja) * 1991-10-28 1993-05-18 Sharp Corp エツチング等の処理槽

Also Published As

Publication number Publication date
JPH0354138Y2 (US07223432-20070529-C00017.png) 1991-11-28

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