JPS6373337U - - Google Patents

Info

Publication number
JPS6373337U
JPS6373337U JP1986168197U JP16819786U JPS6373337U JP S6373337 U JPS6373337 U JP S6373337U JP 1986168197 U JP1986168197 U JP 1986168197U JP 16819786 U JP16819786 U JP 16819786U JP S6373337 U JPS6373337 U JP S6373337U
Authority
JP
Japan
Prior art keywords
container
workpiece
carry
adhesive
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986168197U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543079Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16819786U priority Critical patent/JPH0543079Y2/ja
Priority to PH34571A priority patent/PH25206A/en
Priority to DE8686117185T priority patent/DE3686314T2/de
Priority to EP86117185A priority patent/EP0226949B1/en
Priority to US06/940,328 priority patent/US4718967A/en
Priority to KR1019860010635A priority patent/KR900004688B1/ko
Publication of JPS6373337U publication Critical patent/JPS6373337U/ja
Priority to SG1063/92A priority patent/SG106392G/en
Application granted granted Critical
Publication of JPH0543079Y2 publication Critical patent/JPH0543079Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Adhesives Or Adhesive Processes (AREA)
JP16819786U 1985-12-12 1986-11-04 Expired - Lifetime JPH0543079Y2 (enrdf_load_stackoverflow)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP16819786U JPH0543079Y2 (enrdf_load_stackoverflow) 1986-11-04 1986-11-04
PH34571A PH25206A (en) 1985-12-12 1986-12-09 Control apparatus for reducing adhesive force of adhesive agent adhering between semiconductor wafer and substrate
EP86117185A EP0226949B1 (en) 1985-12-12 1986-12-10 Control apparatus for adhesive force of adhesive agent adhering between semiconductor wafer and substrate
DE8686117185T DE3686314T2 (de) 1985-12-12 1986-12-10 Vorrichtung zur bestimmung der haftkraefte eines klebstoffes zwischen einem halbleiter und seinem substrat.
US06/940,328 US4718967A (en) 1985-12-12 1986-12-11 Control apparatus for reducing adhesive force of adhesive agent adhering between semiconductor wafer and substrate
KR1019860010635A KR900004688B1 (ko) 1985-12-12 1986-12-12 반도체 웨이퍼와 박판을 접착하는 접착제의 접착력 제어장치
SG1063/92A SG106392G (en) 1985-12-12 1992-10-13 Control apparatus for adhesive force of adhesive agent adhering between semiconductor wafer and substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16819786U JPH0543079Y2 (enrdf_load_stackoverflow) 1986-11-04 1986-11-04

Publications (2)

Publication Number Publication Date
JPS6373337U true JPS6373337U (enrdf_load_stackoverflow) 1988-05-16
JPH0543079Y2 JPH0543079Y2 (enrdf_load_stackoverflow) 1993-10-29

Family

ID=31100851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16819786U Expired - Lifetime JPH0543079Y2 (enrdf_load_stackoverflow) 1985-12-12 1986-11-04

Country Status (1)

Country Link
JP (1) JPH0543079Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0543079Y2 (enrdf_load_stackoverflow) 1993-10-29

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