JPS6373261A - Photosensitive body - Google Patents

Abstract

PURPOSE:To stabilize electric charge transfer performance and in a preferable state by forming as a charge transfer layer an organic plasma polymerized film produced by a low-pressure plasma polymerization reaction of an organic gas and containing alkali metal atoms as a chemically modifying substance. CONSTITUTION:The photosensitive body is obtained by successively laminating on a conductive substrate 1 the charge transfer layer 2 and the charge generating layer 3. The charge transfer layer 2 is composed of an amorphous solid of carbon and hydrogen atoms produced by the plasma polymerization of hydrocarbon in a gas phase and containing as the chemical modifying substance at least the alkali metal atoms in an amount of 0.1-10atom% of the total constituent atoms, thus permitting charge transfer performance to be stably retained without undergoing deterioration due to the lapse of time.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a photoreceptor having a charge generation layer and a charge transport layer.

Since the invention of the Carlson method, the application field of electrophotography has continued to make remarkable progress, and various materials have been developed and put into practical use for photoreceptors for electrophotography.

The main electrophotographic photoreceptor materials conventionally used include inorganic substances such as amorphous selenium, selenium, selenium, cadmium sulfide, oxidized tΩ, amorphous silicon, polyvinyl carbazole, total bending phthalocyanine, Disazo pigments, trisazo pigments, perylene pigments, triphenylmethane compounds, triphenylamine compounds, hydrazone compounds, styryl compounds, pyrazoline compounds,
Examples include organic substances such as oxazole compounds and oxadiazole compounds.

In addition, the configurations include a single-layer structure in which these substances are used alone, a binder-type structure in which they are dispersed in a binder, and a Vi layer pear-shaped structure in which a charge generation layer, a charge transport layer, etc. are provided for each function. can be mentioned.

However, the electron η photoreceptor materials that have been used hitherto have their own drawbacks. One of them is the toxicity to the human body, and all of the materials other than the amorphous silicon described above have properties that are not IE. In addition, in order for an electrophotographic photoreceptor to be actually used in a copying machine, it must always maintain stable performance even when exposed to harsh environmental conditions such as charging, exposure, development, transfer, neutralization, and cleaning. However, all of the organic substances mentioned above have poor durability and many unstable factors in terms of performance. In order to eliminate such drawbacks, in recent years, amorphous silicon produced by a glow discharge method has been increasingly applied to electrophotographic photoreceptors as a material with improved toxicity and high durability. However, since amorphous silicon requires highly ignitable silane gas as a raw material, it is highly dangerous to manufacture. Furthermore, although a large amount of silane gas is required, since it is an expensive gas, the resulting electrophotographic photoreceptor is also significantly more expensive than conventional photoreceptors. Also,
There are many disadvantages in production, such as the film formation rate being slow and a large amount of soot-producing undecomposed silane products being generated in the form of dust during film formation. If this dust gets mixed into the photosensitive layer during manufacturing, it will significantly adversely affect image quality. Furthermore, since amorphous silicon originally has a high dielectric constant, its charging performance is low, and in order to charge it to a predetermined surface potential in a copying machine, a high power is required for charging.

Plasma organic polymerized films themselves are older (more well known, such as diene (M, 5hen) and bel (A, T, Be11).
) et al., Journal of Applied Polymer Science (1973)
plied Polymer 5science) No. 17
On pages 885-892 of Vol.
American Chemical Society (Ameri) in 1979
can Chemical 5ociety)
lymerizati.

n), its film formability is also discussed.

However, plasma organic polymer films prepared by conventional methods are used only for applications that assume insulation properties, that is, they are considered to be insulating films with a specific resistance of about <1016 Ωcm, like ordinary polyethylene films. Or at least it was used with the recognition that it was such a membrane.

Due to the same recognition, its actual use in electrophotographic photoreceptors has been limited to protective layers, adhesive layers, blocking layers, or insulating layers, and has only been used as so-called undercoat layers or overcoat layers. .

For example, JP-A-59-28161 discloses a photoreceptor in which a plasma-polymerized polymer layer having a network structure is provided on a substrate as a blocking layer and an adhesive layer, and an amorphous silicon layer is provided on the polymer layer. ing. Japanese Patent Application Publication No. 5
Publication No. 9-38753 discloses that 10 to 100 plasma polymerized films with a high resistance of 1013 to 1015 Ωcm, which are generated from a mixed gas of oxygen, nitrogen, and hydrocarbons, are formed on a substrate as a blocking layer and an adhesive layer. discloses a photoreceptor provided with an amorphous silicon layer. Unexamined Japanese Patent Publication 1987-
Publication No. 136742 discloses a photoreceptor in which a carbon film of approximately 1 to 5 μm is formed on the surface of the substrate as a protective layer to prevent aluminum atoms from diffusing into the amorphous silicon layer provided on the aluminum substrate during light irradiation. is disclosed.

Japanese Unexamined Patent Publication No. 60-63541 discloses a photosensitive material in which a diamond-like carbon film with a thickness of 200 to 2 μm is provided in the middle as an adhesive layer in order to improve the adhesion between an aluminum substrate and an amorphous silicon layer provided thereon. It is disclosed that the film thickness is preferably 2 μm or less in terms of residual charge.

All of these disclosures are inventions in which a so-called undercoat layer is provided between the substrate and the amorphous silicon layer,
There is no disclosure regarding charge transport properties, and a-3i
This does not solve the above-mentioned inherent open sound problem.

Furthermore, for example, Japanese Patent Application Laid-Open No. 50-20728 and US Pat. No. 3,956.525 disclose that a polymer film formed by glow discharge polymerization is applied as a protective layer on the surface of a polyvinylcarbazole-selenium photoreceptor. A photoreceptor having a thickness of 1 to 1 μm is disclosed. Japanese Patent Publication No. 59-214859
The publication discloses a technique for forming a film of about 5 μm on the surface of an amorphous silicon photoreceptor as a protective layer by plasma polymerizing an organic hydrogen monomer such as styrene or acetylene. JP-A No. 60-61761 discloses a photoreceptor provided with a diamond-like carbon thin film of SoOλ~2 μm as a surface protective layer, and it is said that the film thickness is preferably 2 μm or less in terms of translucency. . Tokukai Showa 6
Publication No. 0-249115 discloses a technology using an amorphous carbon or hard carbon film with a thickness of about 0.05 to 5 μm as a surface protective layer, and it is said that if the film thickness exceeds 5 μm, it will adversely affect the activity of the photoreceptor. There is. JP-A-61-94056 discloses an amorphous silicon photoreceptor using an amorphous carbon film with excellent hydrophobicity as a protective layer on the surface of amorphous silicon.

All of these disclosures are inventions in which a so-called overcoat layer is provided on the surface of a photoreceptor, and there is no disclosure about charge transport properties, and they do not solve the above-mentioned essential problems of a-Si. . Also, JP-A-51-461
No. 30 discloses that the surface of a polyvinylcarbazole electrophotographic photoreceptor is subjected to glow discharge polymerization to obtain
Although an electrophotographic photosensitive plate on which a micrometer-thick polymer film is formed has been disclosed, there is no mention of charge transport properties, and the above-mentioned essential problems of a-Si are not solved.

Point I to be Solved by the Invention As mentioned above, plasma organic polymer films used in electrophotographic photoreceptors have conventionally been used as so-called undercoat layers or overcoat layers; It is a membrane that does not require a transport function, and is used based on the judgment that the organic polymer membrane is insulating.Therefore, it is only used as an extremely thin membrane with a thickness of about 5 μm, and is used as a carrier. It is used only in films that are thin enough to pass through the film due to the tunnel effect, or where the tunnel effect cannot be expected, so that the residual potential does not pose a problem in practical use.

In a functionally separated electrophotographic photoreceptor, the charge transport layer must have carrier transport properties, and the carrier mobility must be at least 10-7 [cm2/V/s e
c ] or higher is required. In addition, in order to be used suitably in an electrophotographic system, it is necessary to have excellent charging performance, and a withstand voltage of at least 10 [V/μm] is required, and in order to roughly reduce the load on the charger, It is preferable to have a value of 6 or less in terms of ratio.

The present inventors have been studying the application of plasma organic polymer films to electrophotographic photoreceptors for many years, and discovered that organic polymer films, which were originally thought to be insulating, were used as chemical modifiers. It has been found that by adding alkali metal atoms, the specific resistance decreases and the material begins to easily exhibit suitable charge transport properties. There are many unclear points in the theoretical interpretation, and it is not possible for the present inventor to discuss it in detail. It is presumed that this is because residual free radicals and the like effectively contribute to charge transport properties due to changes in polarization or steric structure due to the incorporation of alkali metal atoms.

Furthermore, in a state in which no alkali metal atoms are added, the polymer film tends to exhibit a decrease in transportability over time after film formation, that is, a decrease in sensitivity; however, when alkali metal atoms are added as a chemical modifier, It has been found that, by this, the charge transport properties of the charge transport layer can be stably ensured without being subject to deterioration over time. In general, the addition of alkali metal atoms ensures suitable potential attenuation even in the bright attenuation characteristics in the low electric field region of the photoreceptor, lowers the base of so-called LDC, and has the effect of significantly preventing the generation of residual potential. I found out something. By utilizing these new findings, the present invention solves all of the above-mentioned essential problems of the a-Si photoreceptor, and also creates an organic polymer film, especially an organic polymer film, which has a completely different usage purpose and characteristics from conventional ones. The object of the present invention is to provide a photoreceptor using an organic plasma polymerized film as a charge transport layer.

The present invention eliminates the drawbacks of conventional electrophotographic photoreceptors, and uses a chemical modifier produced by a plasma polymerization reaction of an organic gas under low pressure as a charge transport layer. The present invention relates to a photoreceptor characterized by having a plasma organic polymer film containing alkali metal atoms. Although the charge transport layer does not have clear photoconductivity for visible light or light with a wavelength near semiconductor laser light, it stably provides suitable charge transport properties, and has excellent conductivity and durability. Because it has excellent photoconductor performance such as weather resistance and environmental pollution resistance, and is also excellent in light transmission, it provides an extremely high degree of freedom especially when forming a laminated structure as a function-separated photoconductor. be.

Specifically, the present invention provides a photoreceptor having a charge generation layer and a charge transport layer, in which a hydrocarbon plasma polymerized film is provided as the charge transport layer, and at least an alkali metal atom is added as a chemical modifier in the polymer film. 0 for all constituent atoms
．． It particularly relates to an electrophotographic photoreceptor containing 1 to 10 atom %. (Hereinafter, the polymer film according to the present invention will be described as a-
The amounts of carbon atoms, hydrogen atoms, and alkali metal atoms in the a-C film according to the present invention can be determined by using conventional methods of elemental analysis, such as organic elemental analysis and Auger analysis. It is possible.

In the present invention, hydrocarbons are used as organic gases for forming the a-C film. The phase state of the hydrocarbon does not necessarily have to be a gas phase at normal temperature and normal pressure,
It can be used in either liquid phase or solid phase as long as it can be vaporized through melting, evaporation, sublimation, etc. by heating or reduced pressure.

Examples of the hydrocarbons used include saturated hydrocarbons, unsaturated hydrocarbons, alicyclic hydrocarbons, aromatic hydrocarbons, and the like.

There are many types of hydrocarbons that can be used, but examples of saturated hydrocarbons include methane, ethane, propane, butane,
Pentane, hexane, heptane, octane, nonane, decane, undecane, dodecane, tridecane, tetradecane, pentadecane, hexadecane, heptadecane, octadecane, nonadecane, eicosane, heneicosane,
tocosan, tricosane, tetracosan, pentacosan,
Normal paraffins such as hexacosane, heptacosane, octacosane, nonacosane, triacontane, todoriacontane, pentatriacontane, etc., as well as isobutane, isopentane, neopentane, isohexane, neohexane, 2,3-dimethylbutane, 2-methylhexane, 3- Ethylpentane, 2,2-dimethylpentane, 2
, 4-dimethylpentane, 3.3-dimethylpentane,
Tributane, 2-methylhebutane, 3-methylhebutane, 2.2-dimethylhexane, 2,2.5-dimethylhexane, 2.2.3-trimethylpentane, 2,2.4
Isoparaffins such as -trimethylpentane, 2.3.3-trimethylpentane, 2,3.4-trimethylpentane, isonanone, etc. are used. Examples of unsaturated hydrocarbons include ethylene, propylene, isobutylene, 1-butene, 2-butene, 1-pentene, 2-pentene, 2-methyl-1-butene, 3-methyl-1-butene, 2-methyl -Olefins such as 2-butene, 1-hexene, tetramethylethylene, 1-heptene, 1-octene, 1-nonene, 1-decene, and allene, methylalene, butadiempentadiene, hexadiene and cyclopentadiene , etc., triolefins such as ocimene, allocimene, myrcene, hexatriene, etc., and acetylene, methylacetylene, 1
-butyne, 2-butyne, 1-pentyne, 1-hexyne,
1-heptyne, 1-octyne, 1-nonine, 1-decyne, etc. are used. Examples of alicyclic hydrocarbons include:
Cycloparaffins such as cyclopropane, cyclobutane, cyclopentane, cyclohexane, cyclohebutane, cyclooctane, cyclononane, cyclodecane, cyclountecane, cyclododecane, cyclotridecane, cyclotitradecane, cyclopentadecane, cyclohexadecane, and cyclopropene, Cycloolefins such as cyclobutene, cyclopentene, cyclohexene, cycloheptene, cyclooctene, cyclononene, cyclodecene, limonene, terbirun, phelandrene, sylvestrene, thuene, carene, pinene, bornylene, kanghuen, fuenchen, cyclodecentiene,
Terpenes such as tricyclene, bisabolene, zingiberene, curcumene, humulene, kajinensesesquivenichen, selinene, caryophyllene, santarene, cedrene, campholene, phylloclatene, bodocarprene, and mirene, as well as steroids, are used. Examples of aromatic hydrocarbons include benzene, toluene, xylene, hemimelithene, pseudocumene, mesitylene, prenitene, isodurene, durene, pentamechelbenzene, hexamethylbenzene, ethylbenzene, propylbenzene,
Cumene, styrene, biphenyl, terphenyl, diphenylmethane, triphenylmethane, dibenzyl, stilbene, indene, naphthalene, tetralin, anthracene, phenanthrene, etc. are used.

The amount of hydrogen atoms contained in the a-C film in the present invention is 0.1 to 67 at%, preferably 30 to 60 at%, based on the total amount of carbon atoms and hydrogen atoms. When the amount of hydrogen atoms is lower than 0.1 at%, the transport performance decreases,
Suitable photosensitivity cannot necessarily be obtained. The amount of hydrogen atoms is 6
If it is higher than 7 at %, the charging ability will be lowered and the film forming properties will be deteriorated.

The amount of hydrogen atoms contained in the a-C film of the present invention can be changed depending on the form of the film forming apparatus and the conditions during film forming. To lower the amount of hydrogen, for example, the substrate temperature can be changed. increase, lower the pressure, lower the dilution rate of the raw F4 hydrocarbon gas, use a raw material gas with a lower hydrogen atom content, increase the applied power, lower the frequency of the alternating electric field, superimpose it on the alternating electric field. This can be controlled by increasing the DC electric field strength.

The thickness of the a-C film as the charge transport layer in the present invention is 5 to 5
A suitable value is 0 μm, especially 7 to 20 μm; if it is thinner than 5 μm, the charging potential will be low, making it impossible to obtain a sufficient copy image density. Moreover, if it is thicker than 50 μm, it is not preferable in terms of productivity. This a-C film has high light transmittance, high dark resistance, and is rich in charge transport properties.As mentioned above, even if the film thickness is 5 μm or more, carriers are transported without being trapped, effectively contributing to bright attenuation. It is possible to do so.

In the present invention, in addition to hydrocarbons, an alkali metal compound is used to add halogen atoms into the a-C film. Here, the alkali metal atom refers to a lithium atom, a sodium atom, a potassium atom, a rubidium atom, and a cesium atom. The phase state of the alkali metal compound gas does not necessarily have to be a gas phase at room temperature and normal pressure, and since there are few compounds in a gas phase, it is possible to vaporize through melting, evaporation, sublimation, etc. by heating or reduced pressure. If available, either liquid phase or solid phase can be used. As the alkali metal compound, for example, metal alcoholade, metal acrylic acid, metal methacrylic acid, metal phthalocyanine, etc. can be used.

The process of forming an a-C film from a raw material gas in the present invention is a method in which the raw material gas is formed through a plasma state generated by a plasma method using direct current, low frequency, high frequency, microwave, etc. is the most preferable, but neutral particles may also be formed through an ionic state generated by ionization vapor deposition, ion beam vapor deposition, etc., or neutral particles generated by vacuum vapor deposition, sputtering, etc. It may be formed entirely from the above, or may be formed from a combination of these. What is important in this case is to form the a-C film so that the hydrogen atoms and alkaline earth atoms contained in the a-C film are within the above-mentioned range.

In the present invention, the amount of alkali metal atoms contained as a chemical modifier is 0.1 to 10
% by atom, preferably from 0.3 to 5 atomic%. If the amount of alkali metal atoms is lower than 0.1 atomic %, suitable charge transport properties are not necessarily guaranteed, and sensitivity decreases or residual potential is likely to occur, and sensitivity stability over time is also guaranteed. It will no longer be done. When the amount of alkali metal atoms is higher than 10 atomic %, the alkali metal atoms which, when added in an appropriate amount, ensure suitable charge transport properties and prevention of residual potential generation, conversely cause a decrease in charging ability. Furthermore, film-forming properties are not necessarily guaranteed, and the film is likely to peel off, become oily, or turn into powder.

In the present invention, the amount of alkali metal atoms that can be contained as a chemical modifier can be controlled mainly by increasing or decreasing the amount of the alkali metal compound introduced into the reaction chamber in which the plasma reaction is performed. By increasing the amount of alkali metal compound introduced, it is possible to increase the amount of alkali metal atoms added to the a-C film according to the present invention, and conversely, by decreasing the amount of alkali metal compound introduced, it is possible to increase the amount of alkali metal atoms added to the a-C film according to the present invention. ,
It is possible to reduce the amount of alkali metal atoms added to the a-C film according to the present invention.

The charge generation layer used in the photoreceptor according to the present invention is not particularly limited, and examples include amorphous selenium, selenium arsenide, selenium tellurium, cadmium sulfide, zinc oxide, and optionally different elements (such as hydrogen, boron, carbon, nitrogen,
Inorganic substances such as amorphous silicon containing oxygen, fluorine, phosphorus, sulfur, chlorine, bromine, germanium, etc.), polyvinyl carbazole, cyanine compounds, metal phthalocyanine compounds, Ab compounds, perylene compounds, triaryl Methane compounds, triphenylmethane compounds, triphenylamine compounds, hydrazone compounds, styryl compounds, birapurine compounds, oxazole compounds, oxazine compounds, oxadiazole compounds, thiazine compounds, xanthine compounds, Organic substances such as biryllium compounds, quinacridone compounds, indigo compounds, polycyclic quinone compounds, disbenzimidazole compounds, induthrone compounds, and squarylium compounds can be used. In addition to this, any material can be used as long as it can efficiently generate photo-excited carriers by irradiation light and can efficiently inject the carriers into the charge transport layer.

Furthermore, the charge generation layer is not subject to any limitations in the manufacturing method; for example, the charge transport layer (a-
It may be formed by the same manufacturing method as for C film), or by electrodeposition in a liquid phase, coating by spraying or dipping, or the like. Among these, it is preferable to form the film by the same manufacturing method as that for the charge transport layer in the present invention, since this leads to reduction in manufacturing equipment cost and labor in the process.

The photoreceptor in the present invention is a photoreceptor comprising a charge generation layer and a charge transport layer, and the charge generation layer and the charge transport layer have v4
The layer structure can be appropriately selected as necessary.

FIG. 1 shows an example of the structure of a photoreceptor of the present invention, in which a charge transport layer (2) and a charge generation layer (3) are successively laminated on a conductive substrate (1). . Figure 2 shows
As another form, a charge generation layer (
3) and charge transport N(2) are sequentially laminated. FIG. 3 shows, as another form, a structure in which a charge transport layer (2), a charge generation layer (3), and a charge transport layer (2) are sequentially laminated on a conductive substrate (1). It is something.

When the surface of the photoreceptor is positively charged, for example, by a corona charger, and then used for image exposure, in FIG. 1, holes generated in the charge generation layer (3) are transferred to the charge transport layer (2). In Figure 2, electrons generated in the charge generation layer (3) travel in the charge transport layer (2) towards the surface of the photoreceptor; Holes generated in the charge generation layer (3) travel in the charge transport layer (2) toward the conductive substrate (1), and at the same time, electrons generated in the charge generation layer (3) travel to the upper charge transport layer ( 2) The electrostatic latent image travels through the photoreceptor surface and forms an electrostatic latent image with proper brightness attenuation. On the other hand, when the surface of the photoreceptor is negatively charged and then used for image exposure, the behavior of electrons and holes can be exchanged to understand the mobility of carriers. In FIGS. 2 and 3, the irradiation light for image exposure is applied to the charge transport layer (
2) Since the charge transport layer according to the present invention has excellent light transmittance, it is possible to form a suitable latent image.

FIG. 4 shows, as a further embodiment, a charge transport layer (2), a charge generation layer (3) and a surface protective layer (
4) shows an example of the structure of the photoreceptor of the present invention, which is formed by sequentially laminating layers 4) and 4). In other words, it corresponds to the form shown in Fig. 1 with a surface protective layer provided, but in the form shown in Fig. 1, since the outermost surface is a charge generation layer which is not particularly limited in the present invention, it is not practical in many cases. In order to ensure the above durability, it is preferable to provide a surface protective layer. In the case of the configurations shown in FIGS. 2 and 3, since the outermost surface is the highly durable charge transport layer according to the present invention, there is no need to provide a surface protective layer. A surface protective layer may also be provided for the purpose of adjusting the consistency of various elements within the copying machine, such as preventing dirt on the copying machine.

FIG. 5 shows an intermediate layer (5), a charge generation layer (3), and a charge transport layer (2) on a conductive substrate (1) as a rough form.
This figure shows a structure in which these are sequentially laminated. That is, the second
This corresponds to the form shown in the figure with an intermediate layer provided, but in the form shown in Fig. 2, the bonding surface with the conductive substrate is a charge generation layer which is not particularly limited in the present invention, so in many cases It is preferred to provide an intermediate layer to ensure adhesion and injection blocking effect. In the case of the configurations shown in Figures 1 and 3,
Since the bonding surface with the conductive substrate is the charge transport layer of the present invention, which has excellent adhesiveness and injection blocking effect, there is no need to provide an intermediate layer, but it is not necessary to provide an intermediate layer. In addition, for the purpose of adjusting compatibility with the manufacturing process before the formation of the photosensitive layer, it is possible to provide an intermediate layer as a further form.

FIG. 6 shows, as a further embodiment, an intermediate layer (5), a charge transport layer (2), and a charge generation layer (3) on a conductive substrate (1).
This figure shows a structure in which a surface protection layer N(4) and a surface protection layer N(4) are sequentially laminated. That is, it corresponds to the form shown in FIG. 1 with an intermediate layer and a surface protective layer provided. The reason for providing the intermediate layer and the surface protective layer is the same as described above, and therefore, providing the intermediate layer and the surface protective layer in the configurations shown in FIGS. 2 and 3 can be an alternative form.

In the present invention, the intermediate layer and the surface protective layer are not particularly recommended in terms of material or manufacturing method, and can be appropriately selected as long as the predetermined purpose can be achieved. An a-C film according to the invention may also be used. However, if the material used is, for example, an insulating material as described in the conventional example, the film thickness must be kept at 5 μm or less to prevent generation of residual potential.

The charge transport layer of the photoreceptor according to the present invention decomposes molecules in a gas phase by discharge decomposition under reduced pressure, and diffuses active neutral species or charged species contained in the generated plasma atmosphere onto the substrate, using electric force or magnetic force. It is preferable that the polymer be generated by a so-called plasma polymerization reaction, which is induced by force or the like and deposited as a solid phase by a recombination reaction on a substrate.

FIG. 7 shows an apparatus for manufacturing a photoreceptor according to the present invention, and in the figure (701') to (706) are first to sixth chambers in which raw material compounds and carrier gas, which are in a gas phase at room temperature, are sealed.
tanks, and each tank has first to sixth control valves (707
) ~ (712) and the first to sixth flow rate controllers (713) ~
(718). (719) to (72) in the figure
1) are first to third containers containing raw material compounds that are in a liquid or solid state at room temperature, and each container is heated by the first to third temperature regulators (722) to (724) for vaporization. Roughly each container has seventh to ninth control valves (725) to (727) and seventh to ninth flow rate controllers (725) to (727).
728) to (730) are disconnected. These gases are mixed in a mixer (731) and then sent into a reaction chamber (733) via a main pipe (732). The pipes along the way can be heated by appropriately placed pipe heaters (734) so that the gas, which is the vaporized raw material compound that is in a liquid or solid state at room temperature, does not condense on the way. . Inside the reaction chamber, there is a ground electrode (735) and a power supply voltage t.
i (736) are installed facing each other, and each electrode can be heated by an electrode heater (737). The power application electrode (736) is connected to a high frequency power source (739) and a low frequency power matching box (738) via a high frequency power matching box (738).
40) to a low frequency power source (741), and a low-pass filter (742) to a DC power source (743)! 15!
The connection selection switch (744) allows power of different frequencies to be applied. Reaction chamber (733
) can be adjusted by the pressure control # (745), and the pressure in the reaction chamber (733) can be reduced by the exhaust system selection valve (7
46), a diffusion pump (747), an oil rotary pump (748), or a cooling exclusion device (749), a mechanical booster pump (750), an oil rotary pump (7
48). The exhaust gas is made safe and harmless by a suitable exclusion device (753) and then exhausted into the atmosphere. These exhaust system piping can also be heated by appropriately placed piping heaters (734) to prevent the vaporized gas from the raw material compound, which is in a liquid or solid phase at room temperature, from condensing on the way. ing. The reaction chamber (733) is also equipped with a reaction chamber heater (751) for the same reason.
), and a conductive substrate (752) is installed on the electrodes arranged inside. In FIG. 7, the conductive substrate (752) is fixed to the ground electrode (735) and distributed, but it may also be fixed to the power application electrode (736) or distributed roughly on both sides. good.

FIG. 8 shows another embodiment of the photoconductor manufacturing apparatus according to the present invention, which is similar to the photoconductor manufacturing apparatus according to the present invention shown in FIG. 7 except for the internal configuration of the reaction chamber (833). can be,
The numbers that have been added can be interpreted by converting the 700s to 800s. In FIG. 8, the reaction chamber (83
3) A cylindrical conductive substrate (852) that also serves as the ground electrode (735) in FIG. 7 can be installed inside, and an electrode heater (837) is arranged inside. Conductive substrate (
852) There is also a cylindrical power application electrode (
836) is arranged, and an electrode heater (837) is arranged outside. The conductive substrate (852) is rotatable using an external drive motor (854).

The reaction chamber used for photoreceptor production is preliminarily heated by a diffusion pump.
The pressure is reduced to about 0-4 to 10-6 Torr, and the degree of vacuum is confirmed and the gas adsorbed inside the device is desorbed. At the same time, an electrode heater heats the electrode and the conductive substrate fixedly disposed on the electrode to a predetermined temperature. If necessary, an undercoat layer or a charge generation layer may be provided in advance on the conductive substrate in order to obtain a desired photoreceptor structure from among those described above. The present apparatus or a separate apparatus may be used to provide the undercoat layer or the charge generation layer. Next, raw material gases consisting of hydrocarbons and alkali metal compounds are introduced into the reaction chamber from the first to sixth tanks and the first to third tanks while being kept at a constant flow rate using the first to ninth flow rate controllers. , a pressure regulating valve maintains a constant reduced pressure inside the reaction chamber. After the gas flow rate is stabilized, a connection selection switch is used to select, for example, a high frequency power source, and high frequency power is applied to the power application electrode. A discharge starts between the two electrodes, and over time a solid phase film is formed on the substrate. The film thickness is controlled by the reaction time, and when a predetermined film thickness is reached, the discharge is stopped to obtain the a-C film according to the present invention as a charge transport layer.

This a-C film contains at least an alkali metal atom as a chemical modifier in an amorphous solid composed of charcoal atoms and hydrogen atoms produced by the present invention at a rate of 0.1% relative to all constituent atoms.
It is particularly preferable that the film contains from 1 to 10 atomic percent.Next, the first to ninth control valves are closed, and the reaction chamber is sufficiently evacuated.If the desired photoreceptor configuration is obtained, The vacuum in the reaction chamber is broken and the photoreceptor according to the present invention is taken out from the reaction chamber.Furthermore, if a charge generation layer or an overcoat layer is required in the desired photoreceptor configuration, the present apparatus may be used as is, or Alternatively, in the same way, the vacuum is once broken, the photoreceptor is taken out and transferred to another apparatus, and these layers are provided thereon to obtain a photoreceptor according to the present invention.

The present invention will be explained below with reference to Examples.

1 Using the manufacturing apparatus according to the present invention, a photoreceptor of the present invention having a conductive substrate, a charge transport layer, and a charge generation layer provided in this order as shown in FIG. 1 is manufactured, and a charge transport layer forming step is carried out. : (C
TL process) In the glow discharge decomposition apparatus shown in Fig. 7,
First, after creating a cavity vacuum of about 10-6 Torr inside the reaction device (733), the first, second, and seventh control valves (733)
07, 708, and 725) and release the first tank (7
01) and ethylene gas from the second tank (702) under an output pressure of 1.0 Kg/am2, and
Lithium tertiary-butylade gas is fed from the first container (719) into the first, second, and seventh flow rate controllers (713, 714, and 728) at a temperature of 165°C in the first temperature controller (722). I let it flow in. Then, by adjusting the scale of each flow rate controller, the flow rate of hydrogen gas was set to 40 sec cm, the flow rate of ethylene gas was 30 secms, and the flow rate of lithium tert-butyrad gas was set to 1 secm, and the mixture was mixed in the middle ( 731), the main pipe (732
) into the reaction chamber (733). After each flow rate stabilizes, the pressure inside the reaction chamber (733) is 0.3 Torr.
The pressure regulating valve (745) was adjusted so that the temperature was r. On the other hand, as the conductive substrate (752), use an aluminum substrate of W50 x width 50 x thickness 3 mm, heat it to 200°C in advance, and when the gas flow rate and pressure are stable, connect the connection selection switch (744) in advance. The high frequency power source (739) connected to the conductive substrate (752 ) A 15 μm thick a-C film was formed as a charge transport layer thereon. After the film formation was completed, power application was stopped, the control valve was closed, and the inside of the reaction chamber (733) was sufficiently evacuated.

When CHN quantitative analysis was performed on the a-C film obtained as described above, the amount of hydrogen atoms contained was approximately 47 at% based on the total amount of carbon atoms and hydrogen atoms. The amount of alkali metal atoms, ie, lithium atoms, that could be contained was about 0.1 atomic % based on the total constituent atoms.

Charge generation layer forming step: (CGL step) Next, the first
The control valve (707) and the sixth control valve (712) are released, and hydrogen gas is supplied from the first tank (701) and silane gas is supplied from the sixth tank (706) to the first, and the sixth flow rate controller (713 and 718)
It flowed inside. Adjust the scale of each flow rate controller to set the flow rate of hydrogen gas to 101005e and the flow rate of silane gas to 65 seconds, and do not let them flow into the reaction chamber (733). After each flow rate stabilizes, the pressure regulating valve (745) is adjusted so that the pressure in the reaction chamber (733) becomes 0.8 Torr.
) was adjusted. On the other hand, the conductive substrate (752) on which the a-C film is formed is heated to 250°C, and is heated at a frequency of 13.56 MHz from a high frequency power source (739) while the gas flow rate and pressure are stable. Power application electrode (736)
A power of 200 Watts was applied to generate glow discharge. This discharge was carried out for 20 minutes, and a 0°4 μm thick a
-3i:H charge generation layer was formed.

Characteristics: When a photoreceptor with tq is used in a commonly used Carlson process, the R south charging potential (hereinafter referred to as VmaX) is -
700V, that is, the total photoreceptor film thickness is 15.4um, so the charging capacity per 1μm (hereinafter referred to as C, A) is extremely high at 45.5V/μm, which indicates sufficient charging performance. It made sense to have this. In addition, the time required for dark decay from Vmax to 90% of Vmax in the dark (hereinafter referred to as Td) is approximately 20 seconds, which indicates that it has sufficient charge retention performance. Ta. In addition, the required amount of light (hereinafter referred to as E) for bright attenuation from Vmax to 20% of Vmax potential is 8.3 lux ◆ seconds, which means that although it is slightly low, it is a practical problem. It was understood that it has a photosensitivity performance that is not known.

From the above, the photoreceptor according to the present invention shown in this example has the ability to function as a photoreceptor. In addition, in the commonly used Carlson process for this photoreceptor,
An image was obtained when the image was transferred.

In the CTL process, the temperature of the first temperature controller (722) and the valve opening degree of the seventh flow rate controller (728) are adjusted to adjust the flow rate of the inflowing lithium tert-butilade to 1. 5 (Example 2), 2 (Example 3), 6 (
Example 4), 10 (Example 5L15 (Example 6)see
A photoreceptor according to the present invention was produced in the same manner as in Example 1 except that m was used. When the a-C film obtained here was previously subjected to CHN quantitative analysis, the amount of hydrogen atoms contained was approximately 49.9% of the total amount of carbon atoms and hydrogen atoms.
53.50.53.54 at.%, and from Auger analysis, the amount of alkali metal atoms, ie, lithium atoms, contained is about 0.3.0.9.2.
It was 8.5.10 at%. Further, the film thicknesses of the a-C films were approximately 14, 12, 10, 9, and 10.2 μm, and 11 μm, respectively.

Characteristics: When the obtained photoreceptor was used in a conventional Carlson process, Vmax was -700, -660, and -51, respectively.
0, -420, -300V, that is, the total photoreceptor film thickness is 14°4.12.4.11.3.10.6.11 respectively.
．． Since it is 6 μm, C and A are each 48.6.53
．． 2.45.1.40.6.26.3V/μm,
From this, it was understood that all the samples except for Example 6 had sufficient charging performance.

Furthermore, it was understood that even in Example 6, although the potential was low, the charging potential was not necessarily unusable. Also, T
d was approximately 20, 15, 10, and 8.5 seconds, respectively, and from this it was understood that the battery had sufficient charge retention ability. Also, E is 4.2.4 respectively. ○, 3.1.1.9.1.2 lux·sec, which indicates that the film has sufficient photosensitivity performance.

From the above, the photoreceptors of the present invention shown in Examples 2 to 5 have excellent performance. Further, the photoreceptor of the present invention shown in Example 6 has photoreceptor performance that can be used in practice, even though it has a low potential. Furthermore, when images were formed and transferred using the commonly used Carlson process for the photoreceptors of Examples 2 to 5, clear images were obtained, and for the photoreceptors of Example 6, although the density was low, A live-action image was also obtained.

Comparative Color 1 A laminated film was produced in the same manner as in Example 1 except that lithium tert-butylade gas was not introduced in the CTL process. For the a-C film obtained here, C
Quantitative HN analysis showed that the amount of hydrogen atoms contained was 55 at% based on the total amount of carbon atoms and hydrogen atoms, and Auger analysis showed that the alkali metal atoms contained,
That is, no lithium atoms were detected.

Characteristics: When the obtained laminated film was used in a common Carlson process, Vmax was -750V, that is, since the total film thickness was 11.5 μm, C and A were 65.2V/
μm, which is extremely high, so it can be understood that the charging performance is sufficient.The Td is about 25 seconds, and it is understood that the charging performance is also sufficient. E was slightly lower at 20 lux·sec, but
It was understood that the sensitivity was sufficient for practical use. However, when E was measured again after three months had elapsed, bright decay did not occur to half the potential even when a light intensity of 80 lux·sec was used, and practical sensitivity performance was not exhibited. In Examples 1 to 6, almost the same sensitivity was obtained even after 3 months, indicating that the sensitivity decreases significantly over time in this dipping layer film.

From the above, the laminated film shown in this example was judged to be unsuitable for use as a photoreceptor. From this, it is understood that in the present invention, addition of alkali metal atoms is essential to ensure suitable sensitivity characteristics.

In the comparative inverted CTL process, the flow rate of ethylene gas was set at 15 sec.
m1 lithium tertiary-butyrad gas flow rate 20
A laminated film was produced in the same manner as in Example 1 except that the thickness was set to sec cm. For the a-C film obtained here, CH
Quantitative N analysis revealed that the amount of hydrogen atoms contained was 51 atomic% based on the total amount of carbon atoms and hydrogen atoms, and Auger analysis revealed that the amount of alkali metal atoms, ie, lithium atoms, contained was 13%. .3 at%.

Characteristics: When the obtained laminated film was used in a commonly used Carlson process, Vmax was -150V, that is, the total film thickness was 12.3 μm, so C and A were 12.2V/
μm, which is extremely low, which makes it clear that it is impractical in terms of charging ability.

From the above, the laminated film shown in this example was judged to be unsuitable for use as a photoreceptor. From this, it can be concluded that in the present invention, addition of excessive alkali metal atoms is undesirable as it leads to a decrease in charging ability.

Using the manufacturing apparatus according to the present invention, a photoreceptor of the present invention was fabricated, as shown in FIG. 1, in which a conductive substrate, a charge transport layer, and a charge generation layer were provided in this order.

CTL process: In the glow discharge decomposition apparatus shown in FIG. 7, first, the inside of the reaction apparatus (733) was heated to 10"T.

After creating a high vacuum of about rr diameter, open the ↓, 2nd, and 7th control valves (7o7, 708, and 725), and release hydrogen gas from the first tank (701) and acetylene from the second tank (702). Output pressure of each gas: 1.0K g/cm
2, and the lithium tert-butylade gas from the first container (719) is supplied to the first temperature controller (722) at a temperature of 1.65°C, and the first, second, and seventh flow rate controllers (
713, 714, and 728). Then, adjust the scale of each flow rate controller to increase the hydrogen gas flow rate to 40
s e cm, the flow rate of acetylene gas is 20 sec
, and the tC amount of lithium tertiary-butylade gas was set to 5 sec, and the intermediate mixer (73
1) and flowed into the reaction chamber (733) from the main pipe (732). After each flow rate stabilized, the reaction chamber (73
3) The pressure regulating valve (745) was adjusted so that the pressure inside was 0.3 Torr. On the other hand, as the conductive substrate (752), use an aluminum substrate of *50 x width 50 x thickness 3 mm, heat it to 200°C in advance, and when the gas flow rate and pressure are stable, connect the connection selection switch (744).
), the low frequency power supply (741) connected to the conductive substrate (752 ), an 8 μm thick a-C film was formed thereon as a charge transport layer. After the film formation is completed,
The application of electric power was stopped, the control valve was closed, and the inside of the reaction chamber (733) was sufficiently evacuated.

a CM'A>CHN obtained as above
A fixed view analysis revealed that the amount of hydrogen atoms contained was about 38 at% based on the total amount of carbon atoms and hydrogen atoms, and roughly Auger analysis showed that the amount of alkali metal atoms, that is, lithium atoms, contained. was about 2.8 at% based on the total constituent atoms.

CGL process: Next, nitrous oxide is added from the fifth tank (705) to O, l.
A charge generation layer was formed in the same manner as in Example 1, except for the fact that the charge generation layer was injected for sec.

Characteristics: When the obtained photoreceptor was used in a common Carlson process, Vmax was -700V, that is, since the total photoreceptor film thickness was 8.4um, C, A, and B were 3.3V.
/um, which is extremely high, and it can be understood from this that it has sufficient charging performance. Furthermore, the Td was approximately 15 seconds, and from this it was understood that it had sufficient charge retention performance. 2 Furthermore, E is 2.1 lux·sec, which indicates that the film has sufficient photosensitivity performance.

From the above, the photoreceptor according to the present invention shown in this example has excellent performance. Further, when an image was formed and transferred to this photoreceptor using the commonly used Carlson process, a clear image was obtained. From this, it is understood that the photoreceptor of the present invention can be manufactured even if the type of raw material hydrocarbon gas is changed.

Using the manufacturing apparatus according to the present invention, a photoreceptor of the present invention was manufactured, as shown in FIG. 1, in which a conductive substrate, a charge transport layer, and a charge generation layer were provided in this order.

CTL process: In the glow discharge decomposition apparatus shown in FIG.
5, and 826), and hydrogen gas was simultaneously supplied from the first tank (801) under an output pressure of 1.0 Kg/cm2.
Lithium tertiary butyrate gas is transferred from the first container (819) to the eleventh regulator (822) at a temperature of 165°C.
Then, the styrene gas is supplied from the second container (820) to the first, seventh, and eighth containers at a temperature of 40° C. to the second temperature controller (823).
into flow controllers (813, 828, and 829).

Then, adjust the scales of each flow rate controller to set the hydrogen gas flow rate to 30 sc'cm and the styrene gas flow rate to 20 sc'cm.
cm, and the flow rate of lithium tertiary-butylade gas is set to 2.5 seconds, and the reaction chamber (83
3) It flowed into the interior. After each flow rate became stable, the pressure control valve (845) was adjusted so that the pressure inside the reaction chamber (833) was 0.3 Torr. On the other hand, a conductive substrate (85
For 2), a cylindrical aluminum substrate with a diameter of 80 m and a length of 330 m3 m was used, heated in advance to 200°C, and connected in advance with the connection selection switch (844) while the gas flow rate and pressure were stable. A low frequency power supply (
841) and 10'O to the power application electrode (836).
A plasma polymerization reaction was carried out for about 30 minutes by applying power of Watts at a frequency of 200 KHz, and the conductive substrate (
852), a 16 μm thick a-C film was formed thereon as a charge transport layer. After the film formation was completed, power application was stopped, the control valve was closed, and the inside of the reaction chamber (833) was sufficiently evacuated.

When the a-C film obtained as described above was subjected to quantitative CHN analysis, the amount of hydrogen atoms contained was approximately 42 at% based on the total amount of carbon atoms and hydrogen atoms, roughly based on Auger analysis. Therefore, the amount of alkali metal atoms, ie, lithium atoms, contained was about 2.3 at % based on the total constituent atoms.

CGL process: Next, the first control valve (807), the fifth control valve (811)
and the sixth control valve (812), and the first tank (812) is released.
01), nitrous oxide gas from the fifth tank (805), and silane gas from the sixth tank (806) at the first, fifth, and sixth flow rate controllers under an output pressure of IKg/cm2. (813, 817, and 818). Adjust the scale of each flow rate controller to set the hydrogen gas flow rate to 3.
Set the flow rate of nitrous oxide gas to 00 sccmS and the flow rate of silane gas to 90 seconds cm,
It was made to flow into the reaction chamber (833). After each flow rate became stable, the pressure control valve (845) was adjusted so that the pressure inside the reaction chamber (833) was 1.0 Torr. On the other hand, the conductive substrate (852) on which the a-C film is completely formed is
After heating to 235℃ and with stable gas flow rate and pressure, a high frequency power supply (839) is used to generate a frequency of 13.56M.
A power of 200 Watt was applied to the power application electrode (836) under Hz to generate glow discharge. This discharge is 1
This was carried out for 5 minutes to form an a-Si:,H charge generation layer having a thickness of 0.4 μm.

Characteristics: When the obtained photoreceptor was used in a commonly used Carlson process, Vmax was -650V, that is, since the total photoreceptor film thickness was 16.4 μm, C, A, and V were 39.6.
The charging performance was extremely high at V/μm, and it was understood from this that it had sufficient charging performance. Also, Td is about 10 seconds,
From this, it was understood that it had sufficient charge retention performance. Moreover, E was 1.5 lux·sec, and from this it was understood that the film had sufficient photosensitivity performance.

From the above, the photoreceptor according to the present invention shown in this example has excellent performance. When this photoreceptor was mounted on a copying machine EP650Z manufactured by Minolta Camera and an image was formed and transferred, a clear image was obtained. From this, it is understood that the photoreceptor of the present invention can be manufactured even if the type of raw material hydrocarbon gas is changed or even in a drum shape.

By using the manufacturing apparatus according to the present invention, a photoreceptor according to the present invention was fabricated, as shown in FIG. 1, in which a conductive substrate, a charge transport layer, and a charge generation layer were provided in this order.

CTL process: In the glow discharge decomposition apparatus shown in FIG. 7, first, inside the reaction apparatus (733) @ 10-6T.

After creating a high vacuum of about rr, open the first, second, and seventh regulator valves (707, 708, and 725) to release hydrogen gas from the first tank (701) and acetylene from the second tank (702). each gas under an output pressure of 1.0 Kg/am2,
Then, the potassium acrylate gas is supplied from the first container (719) to the first temperature controller (722) at a temperature of 225° C., and then to the first, second, and seventh flow rate controllers (713, 714, and 728).
) Inflow into the inside. Then, adjust the scale of each flow rate control device, set the flow rate of hydrogen gas to 40 seconds, the flow rate of acetylene gas to 20 seconds, and the amount of potassium acrylate gas to 0.5 seconds, and mix in the middle! (731) from the main pipe (732) to the reaction chamber (
733). After each flow rate became stable, the pressure control valve (745) was adjusted so that the pressure inside the reaction chamber (733) was 0.15 Torr. On the other hand, as the conductive substrate (752), an aluminum substrate of 50 x 50 x 3 mm thick was used and heated to 150°C in advance.
When the gas flow rate and pressure are stable, turn on the high frequency power source (73) that has been connected in advance using the connection selection switch (744).
9) and apply 120W to the power application electrode (736).
By applying a power of t under a frequency of 13.56 MHz, approximately 4
A conductive substrate (752) is subjected to a time plasma polymerization reaction.
A 5 μm thick a-C film was formed thereon as a charge transport layer. After the film formation was completed, power application was stopped, the control valve was closed, and the inside of the reaction chamber (733) was sufficiently evacuated.

CHN for a-Cffff obtained as above
Quantitative analysis revealed that the amount of hydrogen atoms contained was approximately 38 at% based on the total amount of carbon atoms and hydrogen atoms.Furthermore, Auger analysis revealed that the amount of alkali metal atoms, that is, potassium atoms, that can be contained is approximately 38 at.% based on the total amount of carbon atoms and hydrogen atoms. It was about 0.9 at% based on the constituent atoms.

CGL process: Next, nitrous oxide is added from the fifth tank (705) to O, l.
A charge generation layer was formed in the same manner as in Example 1, except that the charge generation layer was injected for sec.

Characteristics: When the obtained photoreceptor was used in a commonly used Carlson process, Vmax was -450V, that is, since the total photoreceptor film thickness was 5.4 μm, C and A were 83.3V.
/am, which was extremely high, and it was understood from this that it had sufficient charging performance. Moreover, Td was about 25 seconds, which made it reasonable to have sufficient charge retention performance. Furthermore, the E value is 1.5 lux·sec, and from this it can be understood that it has sufficient optical loss performance.

From the above, the photoreceptor according to the present invention shown in this example has excellent performance. Further, when an image was formed and transferred to this photoreceptor using the commonly used Carlson process, a clear image was obtained. From this, it is understood that the photoreceptor of the present invention can be produced even if the type of alkali metal compound gas is changed.

Implementation Example q The photosensitive material of the present invention was prepared in the same manner as in Example 3 except that the CTL process and CGL process were replaced, and a conductive substrate, a charge generation layer, and a charge transport layer were provided in this order as shown in FIG. The body was created.

Characteristics: When the obtained photoreceptor was used in a commonly used Carlson process, Vmax was +680V, that is, the total photoreceptor film thickness was 12.4 μm, so C and A were 54.
It was understood that the charging performance was 8 V/μm, and that the charging performance was sufficient.

Furthermore, the Td was approximately 15 seconds, and from this it was understood that it had sufficient charge retention ability. ° Also, E is 6.2 lux·sec, which indicates that it has sufficient photosensitivity performance, and from the above, the photoreceptor of the present invention shown in this example has excellent performance. . Furthermore, when an image was formed and transferred using the commonly used Carlson process, a clear image was obtained. From this, it is understood that the photoreceptor of the present invention can be produced even if the structure of the layer is changed.

Embodiment 11 A photoreceptor of the present invention was prepared in which a conductive substrate, a charge generation layer, and a charge transport layer were provided in this order, as shown in FIG. 2, using a vapor-deposited film for the charge generation layer.

CGL process: Aluminum chlorophthalocyanine chloride AlClPc (
The vapor-deposited film of C1) was provided on an aluminum substrate to a thickness of about 1000 mm, and the vapor-deposited film was exposed to THF vapor for about 30 minutes to perform a solvent vapor treatment to obtain a charge generation layer. Aluminum chlorophthalocyanine chloride has a boat temperature of 45
0 to 490℃, degree of vacuum 5X10-' to IX10
The film was formed under the conditions of -'Torr and a deposition time of about 10 minutes.

CTL process A photoreceptor of the present invention was obtained by carrying out a CTL process in the same manner as in Example 4, except that the substrate heating temperature was 60°C, on the vapor-deposited film of minium chlorophthalocyanine chloride.

Characteristics: When the obtained photoreceptor was used in a common Carlson process, Vrlax was +450V, that is, the total photoreceptor film thickness was 12.1 μm, so C and A were 37
．． It was understood that the charging performance was 2V/μm, and that the charging performance was sufficient.

Furthermore, the Td was approximately 15 seconds, and from this it was understood that it had sufficient charge retention ability. Moreover, E was 4.2 lux·sec, and from this it was understood that the film had sufficient photosensitivity performance. Roughly speaking, when we measured E in the same way as for white light using a 780 nm semiconductor laser as the exposure source, the value was 8.3 erg/cm2, indicating sufficient photosensitivity performance even for long wavelength light. It was understood that they had.

From the above, the photoreceptor of the present invention shown in this example has excellent performance. Furthermore, when an image was formed and transferred using the commonly used Carlson process, a clear image was obtained. From this fact, it is understood that the photoreceptor of the present invention can be manufactured even if the material of the charge generation layer is changed.

[Brief explanation of the drawing]

FIGS. 1 to 6 are drawings showing the structure of a photoreceptor according to the present invention, and FIGS. 7 to 8 are drawings showing a photoreceptor manufacturing apparatus according to the invention. Applicant Minolta Camera Co., Ltd. Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6

Claims (1)

[Claims] In a photoreceptor having a charge generation layer and a charge transport layer, the charge transport layer is an amorphous solid formed by plasma polymerizing hydrocarbons in a gas phase and whose constituent atoms are carbon and hydrogen; A photoreceptor characterized in that it contains at least 0.1 to 10 atom % of alkali metal atoms as a chemical modifier based on the total constituent atoms.