JPS6372373U - - Google Patents

Info

Publication number
JPS6372373U
JPS6372373U JP16725386U JP16725386U JPS6372373U JP S6372373 U JPS6372373 U JP S6372373U JP 16725386 U JP16725386 U JP 16725386U JP 16725386 U JP16725386 U JP 16725386U JP S6372373 U JPS6372373 U JP S6372373U
Authority
JP
Japan
Prior art keywords
valve
cavity
casing
inlet
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16725386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16725386U priority Critical patent/JPS6372373U/ja
Publication of JPS6372373U publication Critical patent/JPS6372373U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
JP16725386U 1986-10-30 1986-10-30 Pending JPS6372373U (US08118993-20120221-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16725386U JPS6372373U (US08118993-20120221-C00002.png) 1986-10-30 1986-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16725386U JPS6372373U (US08118993-20120221-C00002.png) 1986-10-30 1986-10-30

Publications (1)

Publication Number Publication Date
JPS6372373U true JPS6372373U (US08118993-20120221-C00002.png) 1988-05-14

Family

ID=31099013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16725386U Pending JPS6372373U (US08118993-20120221-C00002.png) 1986-10-30 1986-10-30

Country Status (1)

Country Link
JP (1) JPS6372373U (US08118993-20120221-C00002.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001129386A (ja) * 1999-08-24 2001-05-15 Tokyo Electron Ltd ガス処理装置およびそれに用いられる集合バルブ
US7828016B2 (en) 1999-08-24 2010-11-09 Tokyo Electron Limited Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001129386A (ja) * 1999-08-24 2001-05-15 Tokyo Electron Ltd ガス処理装置およびそれに用いられる集合バルブ
JP4570748B2 (ja) * 1999-08-24 2010-10-27 東京エレクトロン株式会社 ガス処理装置およびそれに用いられる集合バルブ
US7828016B2 (en) 1999-08-24 2010-11-09 Tokyo Electron Limited Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus

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