JPS6371528U - - Google Patents

Info

Publication number
JPS6371528U
JPS6371528U JP16743586U JP16743586U JPS6371528U JP S6371528 U JPS6371528 U JP S6371528U JP 16743586 U JP16743586 U JP 16743586U JP 16743586 U JP16743586 U JP 16743586U JP S6371528 U JPS6371528 U JP S6371528U
Authority
JP
Japan
Prior art keywords
crucible
source device
evaporation source
utility
device characterized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16743586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16743586U priority Critical patent/JPS6371528U/ja
Publication of JPS6371528U publication Critical patent/JPS6371528U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP16743586U 1986-10-29 1986-10-29 Pending JPS6371528U (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16743586U JPS6371528U (US20080293856A1-20081127-C00150.png) 1986-10-29 1986-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16743586U JPS6371528U (US20080293856A1-20081127-C00150.png) 1986-10-29 1986-10-29

Publications (1)

Publication Number Publication Date
JPS6371528U true JPS6371528U (US20080293856A1-20081127-C00150.png) 1988-05-13

Family

ID=31099358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16743586U Pending JPS6371528U (US20080293856A1-20081127-C00150.png) 1986-10-29 1986-10-29

Country Status (1)

Country Link
JP (1) JPS6371528U (US20080293856A1-20081127-C00150.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992996A (ja) * 1982-11-16 1984-05-29 Nec Corp 分子線結晶成長用分子線源

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992996A (ja) * 1982-11-16 1984-05-29 Nec Corp 分子線結晶成長用分子線源

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