JPS6371528U - - Google Patents
Info
- Publication number
- JPS6371528U JPS6371528U JP16743586U JP16743586U JPS6371528U JP S6371528 U JPS6371528 U JP S6371528U JP 16743586 U JP16743586 U JP 16743586U JP 16743586 U JP16743586 U JP 16743586U JP S6371528 U JPS6371528 U JP S6371528U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- source device
- evaporation source
- utility
- device characterized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Description
第１図および第２図は本考案の二つの異なつた
実施の態様による密閉型蒸発源の概念図、第３図
は本考案による蒸発源装置の使用方法を説明する
ための断面図、第４図は従来の密閉型坩堝の断面
図である。
１……坩堝本体、２……蓋、３……嵌合部、４
……蒸発材料、５……噴出孔、６，７……ヒータ
、８……充填物。
1 and 2 are conceptual diagrams of closed-type evaporation sources according to two different embodiments of the present invention, FIG. 3 is a cross-sectional view for explaining how to use the evaporation source device according to the present invention, and FIG. The figure is a sectional view of a conventional closed crucible. 1... Crucible body, 2... Lid, 3... Fitting part, 4
...Evaporation material, 5...Ejection hole, 6, 7...Heater, 8...Filling material.
Claims (1)
に温度制御可能な複数のヒータ を具備することを特徴とする蒸発源装置。[Claims for Utility Model Registration] An evaporation source device characterized by comprising a plurality of heaters provided in different parts of a crucible and whose temperature can be controlled independently.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16743586U JPS6371528U (en) | 1986-10-29 | 1986-10-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16743586U JPS6371528U (en) | 1986-10-29 | 1986-10-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6371528U true JPS6371528U (en) | 1988-05-13 |
Family
ID=31099358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16743586U Pending JPS6371528U (en) | 1986-10-29 | 1986-10-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6371528U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5992996A (en) * | 1982-11-16 | 1984-05-29 | Nec Corp | Molecular beam source for growing crystal using molecular beam |
-
1986
- 1986-10-29 JP JP16743586U patent/JPS6371528U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5992996A (en) * | 1982-11-16 | 1984-05-29 | Nec Corp | Molecular beam source for growing crystal using molecular beam |