JPS6371492U - - Google Patents

Info

Publication number
JPS6371492U
JPS6371492U JP16620086U JP16620086U JPS6371492U JP S6371492 U JPS6371492 U JP S6371492U JP 16620086 U JP16620086 U JP 16620086U JP 16620086 U JP16620086 U JP 16620086U JP S6371492 U JPS6371492 U JP S6371492U
Authority
JP
Japan
Prior art keywords
rotor
rotating shaft
casing
molecular pump
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16620086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16620086U priority Critical patent/JPS6371492U/ja
Publication of JPS6371492U publication Critical patent/JPS6371492U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP16620086U 1986-10-28 1986-10-28 Pending JPS6371492U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16620086U JPS6371492U (fr) 1986-10-28 1986-10-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16620086U JPS6371492U (fr) 1986-10-28 1986-10-28

Publications (1)

Publication Number Publication Date
JPS6371492U true JPS6371492U (fr) 1988-05-13

Family

ID=31096944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16620086U Pending JPS6371492U (fr) 1986-10-28 1986-10-28

Country Status (1)

Country Link
JP (1) JPS6371492U (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0246093U (fr) * 1988-09-26 1990-03-29
WO2005028874A1 (fr) * 2003-09-16 2005-03-31 Boc Edwards Japan Limited Structure de fixation destinee a fixer un arbre de rotor a un corps rotatif et pompe turbomoleculaire possedant cette structure de fixation
JP2013100827A (ja) * 2013-02-27 2013-05-23 Osaka Vacuum Ltd 分子ポンプのロータ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5048512A (fr) * 1973-03-30 1975-04-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5048512A (fr) * 1973-03-30 1975-04-30

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0246093U (fr) * 1988-09-26 1990-03-29
WO2005028874A1 (fr) * 2003-09-16 2005-03-31 Boc Edwards Japan Limited Structure de fixation destinee a fixer un arbre de rotor a un corps rotatif et pompe turbomoleculaire possedant cette structure de fixation
JP2013100827A (ja) * 2013-02-27 2013-05-23 Osaka Vacuum Ltd 分子ポンプのロータ

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