JPS6370699U - - Google Patents
Info
- Publication number
- JPS6370699U JPS6370699U JP1986164189U JP16418986U JPS6370699U JP S6370699 U JPS6370699 U JP S6370699U JP 1986164189 U JP1986164189 U JP 1986164189U JP 16418986 U JP16418986 U JP 16418986U JP S6370699 U JPS6370699 U JP S6370699U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- pole pieces
- magnetic pole
- measuring
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
- Particle Accelerators (AREA)
- Containers, Films, And Cooling For Superconductive Devices (AREA)
Description
第１図は本考案の一実施例を示す断面図、第２
図は本考案において、磁極片間の磁場強度ＢＡと
磁場センサで検出した磁場強度ＢＢの関係を示す
図、第３図は従来の偏向用電磁石の平面図、第４
図は第３図の―線断面図である。
図中、１はビームダクト、２は偏向部、３は磁
極片、４はヨーク、５は偏向コイル、６は磁場測
定用穴、７は磁場センサである。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figures are diagrams showing the relationship between the magnetic field strength BA between the magnetic pole pieces and the magnetic field strength BB detected by the magnetic field sensor in the present invention, Figure 3 is a plan view of a conventional deflection electromagnet, and Figure 4
The figure is a sectional view taken along the line -- in FIG. In the figure, 1 is a beam duct, 2 is a deflection section, 3 is a magnetic pole piece, 4 is a yoke, 5 is a deflection coil, 6 is a hole for measuring a magnetic field, and 7 is a magnetic field sensor.
Claims (1)
片を上下に設け、かつその上下の磁極片を支持す
べく磁極片と一体にリターンヨークを設け、上記
上下の磁極片に偏向コイルを設けた荷電粒子偏向
用電磁石において、上記リターンヨークに磁場測
定用穴を設け、該磁場測定用穴に磁場強度を検出
する磁場センサを設けたことを特徴とする荷電粒
子偏向用電磁石。 Magnetic pole pieces along the deflection portion are provided above and below to deflect charged particles, a return yoke is provided integrally with the magnetic pole pieces to support the upper and lower magnetic pole pieces, and a deflection coil is provided on the upper and lower magnetic pole pieces. An electromagnet for deflecting charged particles, characterized in that the return yoke is provided with a hole for measuring a magnetic field, and the hole for measuring the magnetic field is provided with a magnetic field sensor for detecting the strength of the magnetic field.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986164189U JPH0519840Y2 (en) | 1986-10-28 | 1986-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986164189U JPH0519840Y2 (en) | 1986-10-28 | 1986-10-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6370699U true JPS6370699U (en) | 1988-05-12 |
| JPH0519840Y2 JPH0519840Y2 (en) | 1993-05-25 |
Family
ID=31093078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986164189U Expired - Lifetime JPH0519840Y2 (en) | 1986-10-28 | 1986-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519840Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006170951A (en) * | 2004-12-20 | 2006-06-29 | Nissan Motor Co Ltd | Magnetic measuring instrument and its method |
-
1986
- 1986-10-28 JP JP1986164189U patent/JPH0519840Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006170951A (en) * | 2004-12-20 | 2006-06-29 | Nissan Motor Co Ltd | Magnetic measuring instrument and its method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519840Y2 (en) | 1993-05-25 |