JPS6370554U - - Google Patents

Info

Publication number
JPS6370554U
JPS6370554U JP16393886U JP16393886U JPS6370554U JP S6370554 U JPS6370554 U JP S6370554U JP 16393886 U JP16393886 U JP 16393886U JP 16393886 U JP16393886 U JP 16393886U JP S6370554 U JPS6370554 U JP S6370554U
Authority
JP
Japan
Prior art keywords
positioning pin
vertical direction
spindle
housing
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16393886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447720Y2 (US07541385-20090602-C00001.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986163938U priority Critical patent/JPH0447720Y2/ja
Publication of JPS6370554U publication Critical patent/JPS6370554U/ja
Application granted granted Critical
Publication of JPH0447720Y2 publication Critical patent/JPH0447720Y2/ja
Expired legal-status Critical Current

Links

JP1986163938U 1986-10-25 1986-10-25 Expired JPH0447720Y2 (US07541385-20090602-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986163938U JPH0447720Y2 (US07541385-20090602-C00001.png) 1986-10-25 1986-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986163938U JPH0447720Y2 (US07541385-20090602-C00001.png) 1986-10-25 1986-10-25

Publications (2)

Publication Number Publication Date
JPS6370554U true JPS6370554U (US07541385-20090602-C00001.png) 1988-05-12
JPH0447720Y2 JPH0447720Y2 (US07541385-20090602-C00001.png) 1992-11-11

Family

ID=31092600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986163938U Expired JPH0447720Y2 (US07541385-20090602-C00001.png) 1986-10-25 1986-10-25

Country Status (1)

Country Link
JP (1) JPH0447720Y2 (US07541385-20090602-C00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010266561A (ja) * 2009-05-13 2010-11-25 Hitachi High-Technologies Corp プロキシミティ露光装置、プロキシミティ露光装置のマスクの位置ずれ防止方法、及び表示用パネル基板の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS562703A (en) * 1979-06-21 1981-01-13 Matsushita Electric Ind Co Ltd Waterproof method for waveguide of parabolic antenna

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS562703A (en) * 1979-06-21 1981-01-13 Matsushita Electric Ind Co Ltd Waterproof method for waveguide of parabolic antenna

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010266561A (ja) * 2009-05-13 2010-11-25 Hitachi High-Technologies Corp プロキシミティ露光装置、プロキシミティ露光装置のマスクの位置ずれ防止方法、及び表示用パネル基板の製造方法

Also Published As

Publication number Publication date
JPH0447720Y2 (US07541385-20090602-C00001.png) 1992-11-11

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