JPS6370296U - - Google Patents

Info

Publication number
JPS6370296U
JPS6370296U JP1986164159U JP16415986U JPS6370296U JP S6370296 U JPS6370296 U JP S6370296U JP 1986164159 U JP1986164159 U JP 1986164159U JP 16415986 U JP16415986 U JP 16415986U JP S6370296 U JPS6370296 U JP S6370296U
Authority
JP
Japan
Prior art keywords
electrostrictive element
supported
laminated
axial direction
laminated electrostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986164159U
Other languages
English (en)
Japanese (ja)
Other versions
JPH051992Y2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986164159U priority Critical patent/JPH051992Y2/ja
Publication of JPS6370296U publication Critical patent/JPS6370296U/ja
Application granted granted Critical
Publication of JPH051992Y2 publication Critical patent/JPH051992Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP1986164159U 1986-10-23 1986-10-23 Expired - Lifetime JPH051992Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986164159U JPH051992Y2 (fr) 1986-10-23 1986-10-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986164159U JPH051992Y2 (fr) 1986-10-23 1986-10-23

Publications (2)

Publication Number Publication Date
JPS6370296U true JPS6370296U (fr) 1988-05-11
JPH051992Y2 JPH051992Y2 (fr) 1993-01-19

Family

ID=31093019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986164159U Expired - Lifetime JPH051992Y2 (fr) 1986-10-23 1986-10-23

Country Status (1)

Country Link
JP (1) JPH051992Y2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0430481A (ja) * 1990-05-28 1992-02-03 Nec Corp 圧電アクチュエータの駆動方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5449093A (en) * 1977-09-26 1979-04-18 Nec Corp Piezoelectric actuator
JPS5972135A (ja) * 1982-10-18 1984-04-24 Hitachi Ltd 超精密ｘｙ移動装置
JPS6059981A (ja) * 1983-09-09 1985-04-06 Asahi Okuma Ind Co Ltd 駆動装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5449093A (en) * 1977-09-26 1979-04-18 Nec Corp Piezoelectric actuator
JPS5972135A (ja) * 1982-10-18 1984-04-24 Hitachi Ltd 超精密ｘｙ移動装置
JPS6059981A (ja) * 1983-09-09 1985-04-06 Asahi Okuma Ind Co Ltd 駆動装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0430481A (ja) * 1990-05-28 1992-02-03 Nec Corp 圧電アクチュエータの駆動方法

Also Published As

Publication number Publication date
JPH051992Y2 (fr) 1993-01-19

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