JPS6370092U - - Google Patents
Info
- Publication number
- JPS6370092U JPS6370092U JP16418886U JP16418886U JPS6370092U JP S6370092 U JPS6370092 U JP S6370092U JP 16418886 U JP16418886 U JP 16418886U JP 16418886 U JP16418886 U JP 16418886U JP S6370092 U JPS6370092 U JP S6370092U
- Authority
- JP
- Japan
- Prior art keywords
- viewing window
- screen
- chamber
- detection device
- position detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 2
- 238000012544 monitoring process Methods 0.000 claims 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16418886U JPH0518713Y2 (enExample) | 1986-10-28 | 1986-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16418886U JPH0518713Y2 (enExample) | 1986-10-28 | 1986-10-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6370092U true JPS6370092U (enExample) | 1988-05-11 |
| JPH0518713Y2 JPH0518713Y2 (enExample) | 1993-05-18 |
Family
ID=31093076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16418886U Expired - Lifetime JPH0518713Y2 (enExample) | 1986-10-28 | 1986-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0518713Y2 (enExample) |
-
1986
- 1986-10-28 JP JP16418886U patent/JPH0518713Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0518713Y2 (enExample) | 1993-05-18 |