JPS6370011U - - Google Patents
Info
- Publication number
- JPS6370011U JPS6370011U JP16441786U JP16441786U JPS6370011U JP S6370011 U JPS6370011 U JP S6370011U JP 16441786 U JP16441786 U JP 16441786U JP 16441786 U JP16441786 U JP 16441786U JP S6370011 U JPS6370011 U JP S6370011U
- Authority
- JP
- Japan
- Prior art keywords
- reference mirror
- beam splitter
- mirror
- measurement surface
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16441786U JPS6370011U (da) | 1986-10-27 | 1986-10-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16441786U JPS6370011U (da) | 1986-10-27 | 1986-10-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6370011U true JPS6370011U (da) | 1988-05-11 |
Family
ID=31093516
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16441786U Pending JPS6370011U (da) | 1986-10-27 | 1986-10-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6370011U (da) |
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1986
- 1986-10-27 JP JP16441786U patent/JPS6370011U/ja active Pending