JPS6369712U - - Google Patents
Info
- Publication number
- JPS6369712U JPS6369712U JP16332286U JP16332286U JPS6369712U JP S6369712 U JPS6369712 U JP S6369712U JP 16332286 U JP16332286 U JP 16332286U JP 16332286 U JP16332286 U JP 16332286U JP S6369712 U JPS6369712 U JP S6369712U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- resistant filter
- inert gas
- filter
- temperature sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims 2
Description
第１図は、本考案の排気微粒子処理装置の断面
図、第２図は従来の装置の断面図を示す。 １４…ケース、１５…耐熱フイルタ、１６…排
気加熱装置、２４…不活性ガスの導入管、２５…
開放端、２１…温度感知体。
図、第２図は従来の装置の断面図を示す。 １４…ケース、１５…耐熱フイルタ、１６…排
気加熱装置、２４…不活性ガスの導入管、２５…
開放端、２１…温度感知体。
Claims (1)
- 入出口管を有するケース内に耐熱フイルタを配
設し、耐熱フイルタの上流側に排気加熱装置を設
け、耐熱フイルタの下流側に温度感知体を設け、
さらに耐熱フイルタの上流側に不活性ガスの導入
管の開放端を、該フイルタの中央部に対面させて
配置し、温度感知体からの信号により不活性ガス
の導入管への供給を制御して成る排気微粒子処理
装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16332286U JPS6369712U (ja) | 1986-10-24 | 1986-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16332286U JPS6369712U (ja) | 1986-10-24 | 1986-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6369712U true JPS6369712U (ja) | 1988-05-11 |
Family
ID=31091413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16332286U Pending JPS6369712U (ja) | 1986-10-24 | 1986-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6369712U (ja) |
-
1986
- 1986-10-24 JP JP16332286U patent/JPS6369712U/ja active Pending