JPS6369461U - - Google Patents
Info
- Publication number
- JPS6369461U JPS6369461U JP16347386U JP16347386U JPS6369461U JP S6369461 U JPS6369461 U JP S6369461U JP 16347386 U JP16347386 U JP 16347386U JP 16347386 U JP16347386 U JP 16347386U JP S6369461 U JPS6369461 U JP S6369461U
- Authority
- JP
- Japan
- Prior art keywords
- flange
- ion source
- insulator
- flanges
- bonded portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims 2
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 238000000605 extraction Methods 0.000 claims 1
- 230000013011 mating Effects 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16347386U JPS6369461U (de) | 1986-10-23 | 1986-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16347386U JPS6369461U (de) | 1986-10-23 | 1986-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6369461U true JPS6369461U (de) | 1988-05-10 |
Family
ID=31091704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16347386U Pending JPS6369461U (de) | 1986-10-23 | 1986-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6369461U (de) |
-
1986
- 1986-10-23 JP JP16347386U patent/JPS6369461U/ja active Pending