JPS6369160U - - Google Patents
Info
- Publication number
- JPS6369160U JPS6369160U JP16172686U JP16172686U JPS6369160U JP S6369160 U JPS6369160 U JP S6369160U JP 16172686 U JP16172686 U JP 16172686U JP 16172686 U JP16172686 U JP 16172686U JP S6369160 U JPS6369160 U JP S6369160U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- turntable
- substrate
- etched
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims 2
- 238000005406 washing Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16172686U JPS6336046Y2 (https=) | 1986-10-22 | 1986-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16172686U JPS6336046Y2 (https=) | 1986-10-22 | 1986-10-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6369160U true JPS6369160U (https=) | 1988-05-10 |
| JPS6336046Y2 JPS6336046Y2 (https=) | 1988-09-26 |
Family
ID=31088309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16172686U Expired JPS6336046Y2 (https=) | 1986-10-22 | 1986-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6336046Y2 (https=) |
-
1986
- 1986-10-22 JP JP16172686U patent/JPS6336046Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6336046Y2 (https=) | 1988-09-26 |