JPS6367683U - - Google Patents

Info

Publication number
JPS6367683U
JPS6367683U JP14468487U JP14468487U JPS6367683U JP S6367683 U JPS6367683 U JP S6367683U JP 14468487 U JP14468487 U JP 14468487U JP 14468487 U JP14468487 U JP 14468487U JP S6367683 U JPS6367683 U JP S6367683U
Authority
JP
Japan
Prior art keywords
chamber
partition wall
temperature
cylinder
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14468487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0244071Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14468487U priority Critical patent/JPH0244071Y2/ja
Publication of JPS6367683U publication Critical patent/JPS6367683U/ja
Application granted granted Critical
Publication of JPH0244071Y2 publication Critical patent/JPH0244071Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP14468487U 1987-09-22 1987-09-22 Expired JPH0244071Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14468487U JPH0244071Y2 (enrdf_load_stackoverflow) 1987-09-22 1987-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14468487U JPH0244071Y2 (enrdf_load_stackoverflow) 1987-09-22 1987-09-22

Publications (2)

Publication Number Publication Date
JPS6367683U true JPS6367683U (enrdf_load_stackoverflow) 1988-05-07
JPH0244071Y2 JPH0244071Y2 (enrdf_load_stackoverflow) 1990-11-22

Family

ID=31055516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14468487U Expired JPH0244071Y2 (enrdf_load_stackoverflow) 1987-09-22 1987-09-22

Country Status (1)

Country Link
JP (1) JPH0244071Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0244071Y2 (enrdf_load_stackoverflow) 1990-11-22

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