JPS6367505U - - Google Patents

Info

Publication number
JPS6367505U
JPS6367505U JP16338786U JP16338786U JPS6367505U JP S6367505 U JPS6367505 U JP S6367505U JP 16338786 U JP16338786 U JP 16338786U JP 16338786 U JP16338786 U JP 16338786U JP S6367505 U JPS6367505 U JP S6367505U
Authority
JP
Japan
Prior art keywords
cleanliness
clean room
main body
high degree
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16338786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249204Y2 (US07655688-20100202-C00086.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16338786U priority Critical patent/JPH0249204Y2/ja
Publication of JPS6367505U publication Critical patent/JPS6367505U/ja
Application granted granted Critical
Publication of JPH0249204Y2 publication Critical patent/JPH0249204Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Ventilation (AREA)
JP16338786U 1986-10-23 1986-10-23 Expired JPH0249204Y2 (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16338786U JPH0249204Y2 (US07655688-20100202-C00086.png) 1986-10-23 1986-10-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16338786U JPH0249204Y2 (US07655688-20100202-C00086.png) 1986-10-23 1986-10-23

Publications (2)

Publication Number Publication Date
JPS6367505U true JPS6367505U (US07655688-20100202-C00086.png) 1988-05-07
JPH0249204Y2 JPH0249204Y2 (US07655688-20100202-C00086.png) 1990-12-25

Family

ID=31091537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16338786U Expired JPH0249204Y2 (US07655688-20100202-C00086.png) 1986-10-23 1986-10-23

Country Status (1)

Country Link
JP (1) JPH0249204Y2 (US07655688-20100202-C00086.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03172203A (ja) * 1989-11-30 1991-07-25 Daifuku Co Ltd 荷保管設備
JP2009012965A (ja) * 2007-07-09 2009-01-22 Asyst Technologies Japan Inc ストッカ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03172203A (ja) * 1989-11-30 1991-07-25 Daifuku Co Ltd 荷保管設備
JP2009012965A (ja) * 2007-07-09 2009-01-22 Asyst Technologies Japan Inc ストッカ装置

Also Published As

Publication number Publication date
JPH0249204Y2 (US07655688-20100202-C00086.png) 1990-12-25

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