JPS636738U - - Google Patents
Info
- Publication number
- JPS636738U JPS636738U JP10135186U JP10135186U JPS636738U JP S636738 U JPS636738 U JP S636738U JP 10135186 U JP10135186 U JP 10135186U JP 10135186 U JP10135186 U JP 10135186U JP S636738 U JPS636738 U JP S636738U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer device
- roller
- wafer transfer
- wafer support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009751 slip forming Methods 0.000 claims 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10135186U JPH0621244Y2 (ja) | 1986-07-01 | 1986-07-01 | ウェハ把持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10135186U JPH0621244Y2 (ja) | 1986-07-01 | 1986-07-01 | ウェハ把持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS636738U true JPS636738U (bg) | 1988-01-18 |
| JPH0621244Y2 JPH0621244Y2 (ja) | 1994-06-01 |
Family
ID=30972008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10135186U Expired - Lifetime JPH0621244Y2 (ja) | 1986-07-01 | 1986-07-01 | ウェハ把持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0621244Y2 (bg) |
-
1986
- 1986-07-01 JP JP10135186U patent/JPH0621244Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0621244Y2 (ja) | 1994-06-01 |