JPS6367238U - - Google Patents
Info
- Publication number
- JPS6367238U JPS6367238U JP16181886U JP16181886U JPS6367238U JP S6367238 U JPS6367238 U JP S6367238U JP 16181886 U JP16181886 U JP 16181886U JP 16181886 U JP16181886 U JP 16181886U JP S6367238 U JPS6367238 U JP S6367238U
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- pump
- nozzle
- air
- back unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- 230000002269 spontaneous effect Effects 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16181886U JPS6367238U (zh) | 1986-10-21 | 1986-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16181886U JPS6367238U (zh) | 1986-10-21 | 1986-10-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367238U true JPS6367238U (zh) | 1988-05-06 |
Family
ID=31088487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16181886U Pending JPS6367238U (zh) | 1986-10-21 | 1986-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367238U (zh) |
-
1986
- 1986-10-21 JP JP16181886U patent/JPS6367238U/ja active Pending