JPS6366124U - - Google Patents
Info
- Publication number
- JPS6366124U JPS6366124U JP16079886U JP16079886U JPS6366124U JP S6366124 U JPS6366124 U JP S6366124U JP 16079886 U JP16079886 U JP 16079886U JP 16079886 U JP16079886 U JP 16079886U JP S6366124 U JPS6366124 U JP S6366124U
- Authority
- JP
- Japan
- Prior art keywords
- filter plate
- container
- removal device
- micropores
- dust removal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Prevention Of Fouling (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16079886U JPS6366124U (enExample) | 1986-10-22 | 1986-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16079886U JPS6366124U (enExample) | 1986-10-22 | 1986-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6366124U true JPS6366124U (enExample) | 1988-05-02 |
Family
ID=31086518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16079886U Pending JPS6366124U (enExample) | 1986-10-22 | 1986-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6366124U (enExample) |
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1986
- 1986-10-22 JP JP16079886U patent/JPS6366124U/ja active Pending