JPS6366124U - - Google Patents
Info
- Publication number
- JPS6366124U JPS6366124U JP16079886U JP16079886U JPS6366124U JP S6366124 U JPS6366124 U JP S6366124U JP 16079886 U JP16079886 U JP 16079886U JP 16079886 U JP16079886 U JP 16079886U JP S6366124 U JPS6366124 U JP S6366124U
- Authority
- JP
- Japan
- Prior art keywords
- filter plate
- container
- removal device
- micropores
- dust removal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 4
- 230000007423 decrease Effects 0.000 claims 1
- 239000011148 porous material Substances 0.000 description 1
Landscapes
- Prevention Of Fouling (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図はこの考案の一実施例を示す半断面斜視
図、第２図は第１図の片断面を模式的に示した模
式断面図、第３図は第１図に示した塵埃除去装置
をプラズマドライエツチング装置に適用した断面
図、第４図はこの考案の他の実施例を示す半断面
斜視図、第５図は第４図の片断面を模式的に示し
た模式断面図、第６図は第４図の装置を予備室に
適用した断面図、第７図は従来例の防塵装置を説
明するための部分断面図である。
図中、１，２……容器、１ａ，１２ａ……ホル
ダー部、２，３，４，１３，１４，１５……フイ
ルタ板、２ａ，３ａ，４ａ，１３ａ，１４ａ，１
５ａ……微細孔。
Fig. 1 is a half-sectional perspective view showing an embodiment of this invention, Fig. 2 is a schematic sectional view schematically showing a single cross-section of Fig. 1, and Fig. 3 is the dust removal device shown in Fig. 1. FIG. 4 is a half-sectional perspective view showing another embodiment of this invention; FIG. 5 is a schematic sectional view schematically showing a half section of FIG. 4; FIG. FIG. 6 is a cross-sectional view of the device shown in FIG. 4 applied to a preliminary chamber, and FIG. 7 is a partial cross-sectional view for explaining a conventional dustproof device. In the figure, 1, 2... Container, 1a, 12a... Holder part, 2, 3, 4, 13, 14, 15... Filter plate, 2a, 3a, 4a, 13a, 14a, 1
5a...Minor pore.
Claims (1)
フイルタ板が着脱可能で、上記フイルタ板を装着
した時に閉塞状の空間を形成する容器とを備えた
塵埃除去装置。 (2) 上記フイルタ板を複数とし、間隔をもつて
上記容器に多層に装着したことを特徴とする実用
新案登録請求の範囲第１項記載の塵埃除去装置。 (3) 上記フイルタ板の微細孔の径が、上記容器
の外側から内側に向つた順に小さくなつているこ
とを特徴とする実用新案登録請求の範囲第２項記
載の塵埃除去装置。[Claims for Utility Model Registration] (1) A dust duster comprising a filter plate in which a large number of micropores are formed, and a container in which the filter plate is removable and forms a closed space when the filter plate is attached. removal device. (2) The dust removal device according to claim 1, wherein a plurality of the filter plates are installed in the container in multiple layers at intervals. (3) The dust removal device according to claim 2, wherein the diameter of the micropores in the filter plate decreases from the outside to the inside of the container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16079886U JPS6366124U (en) | 1986-10-22 | 1986-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16079886U JPS6366124U (en) | 1986-10-22 | 1986-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6366124U true JPS6366124U (en) | 1988-05-02 |
Family
ID=31086518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16079886U Pending JPS6366124U (en) | 1986-10-22 | 1986-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6366124U (en) |
-
1986
- 1986-10-22 JP JP16079886U patent/JPS6366124U/ja active Pending