JPS6366124U - - Google Patents

Info

Publication number
JPS6366124U
JPS6366124U JP16079886U JP16079886U JPS6366124U JP S6366124 U JPS6366124 U JP S6366124U JP 16079886 U JP16079886 U JP 16079886U JP 16079886 U JP16079886 U JP 16079886U JP S6366124 U JPS6366124 U JP S6366124U
Authority
JP
Japan
Prior art keywords
filter plate
container
removal device
micropores
dust removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16079886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16079886U priority Critical patent/JPS6366124U/ja
Publication of JPS6366124U publication Critical patent/JPS6366124U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Prevention Of Fouling (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Drying Of Semiconductors (AREA)
JP16079886U 1986-10-22 1986-10-22 Pending JPS6366124U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16079886U JPS6366124U (enrdf_load_stackoverflow) 1986-10-22 1986-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16079886U JPS6366124U (enrdf_load_stackoverflow) 1986-10-22 1986-10-22

Publications (1)

Publication Number Publication Date
JPS6366124U true JPS6366124U (enrdf_load_stackoverflow) 1988-05-02

Family

ID=31086518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16079886U Pending JPS6366124U (enrdf_load_stackoverflow) 1986-10-22 1986-10-22

Country Status (1)

Country Link
JP (1) JPS6366124U (enrdf_load_stackoverflow)

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