JPS6366116U - - Google Patents
Info
- Publication number
- JPS6366116U JPS6366116U JP16196386U JP16196386U JPS6366116U JP S6366116 U JPS6366116 U JP S6366116U JP 16196386 U JP16196386 U JP 16196386U JP 16196386 U JP16196386 U JP 16196386U JP S6366116 U JPS6366116 U JP S6366116U
- Authority
- JP
- Japan
- Prior art keywords
- chemical solution
- housing
- chemical
- etching
- filters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 7
- 238000001914 filtration Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Degasification And Air Bubble Elimination (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16196386U JPS6366116U (enExample) | 1986-10-22 | 1986-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16196386U JPS6366116U (enExample) | 1986-10-22 | 1986-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6366116U true JPS6366116U (enExample) | 1988-05-02 |
Family
ID=31088773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16196386U Pending JPS6366116U (enExample) | 1986-10-22 | 1986-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6366116U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04176125A (ja) * | 1990-11-08 | 1992-06-23 | Nec Corp | ウエハー処理装置 |
-
1986
- 1986-10-22 JP JP16196386U patent/JPS6366116U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04176125A (ja) * | 1990-11-08 | 1992-06-23 | Nec Corp | ウエハー処理装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6366116U (enExample) | ||
| JPH0291689U (enExample) | ||
| JPS6373364U (enExample) | ||
| JPS6318154U (enExample) | ||
| JPS621793U (enExample) | ||
| JPS59193514U (ja) | 自動搬送設備における空気清浄装置 | |
| JPS60132895U (ja) | 水浄化装置 | |
| JPS6010648U (ja) | エア−クリ−ナ | |
| JPH01148847U (enExample) | ||
| JPS5885687U (ja) | 排水口の栓 | |
| JPH0272395U (enExample) | ||
| JPS5858812U (ja) | 「ろ」過フイルタ− | |
| JPS5884552U (ja) | 空気汚染粒子測定用フイルタヘツド | |
| JPS62146492U (enExample) | ||
| JPS58143650U (ja) | 電気そうじ機の補助吸入具 | |
| JPS61200109U (enExample) | ||
| JPS6324396U (enExample) | ||
| JPH0231385U (enExample) | ||
| JPS6377614U (enExample) | ||
| JPS6164858U (enExample) | ||
| JPH0445523U (enExample) | ||
| JPS6280136U (enExample) | ||
| JPS5891415U (ja) | 集塵装置 | |
| JPS62123216U (enExample) | ||
| JPH045216U (enExample) |