JPS6366116U - - Google Patents
Info
- Publication number
- JPS6366116U JPS6366116U JP16196386U JP16196386U JPS6366116U JP S6366116 U JPS6366116 U JP S6366116U JP 16196386 U JP16196386 U JP 16196386U JP 16196386 U JP16196386 U JP 16196386U JP S6366116 U JPS6366116 U JP S6366116U
- Authority
- JP
- Japan
- Prior art keywords
- chemical solution
- housing
- chemical
- etching
- filters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 7
- 238000001914 filtration Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Weting (AREA)
- Degasification And Air Bubble Elimination (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16196386U JPS6366116U (da) | 1986-10-22 | 1986-10-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16196386U JPS6366116U (da) | 1986-10-22 | 1986-10-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6366116U true JPS6366116U (da) | 1988-05-02 |
Family
ID=31088773
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16196386U Pending JPS6366116U (da) | 1986-10-22 | 1986-10-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6366116U (da) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04176125A (ja) * | 1990-11-08 | 1992-06-23 | Nec Corp | ウエハー処理装置 |
-
1986
- 1986-10-22 JP JP16196386U patent/JPS6366116U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04176125A (ja) * | 1990-11-08 | 1992-06-23 | Nec Corp | ウエハー処理装置 |
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