JPS6365337A - Thin film tribology tester - Google Patents

Abstract

PURPOSE:To enable easy evaluation of the tribology characteristic of a thin wear-resistant film and high lubricating film, etc., by providing a stage part, penetrator, motor slider, etc. CONSTITUTION:The stage part 6, a rotating mechanism part, the penetrator 19, a motor 15, the slider 12, a displacement gage 21 and load and resistance detecting means 18, etc., are provided. The amt. of the deviation in the position of the penetrator 19 relative to the center of rotation of a test piece 5 is adjusted as desired by a slider 12, by which multiple scratching tests are concentrically carried out. The displacement gage 21 detects the positional relation between the presser 19 and the test piece 5 and measures the depth of penetration of the top end of the penetrator 19 into the test piece 5. The depth of penetration of the penetrator 19 is exactly measured in the above-mentioned manner; in addition, the load an frictional resistance corresponding to the depth of penetration are simultaneously detected. The tribology characteristic is thus easily evaluated with high accuracy.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a thin film tribology tester, and is used, for example, to evaluate wear-resistant hard films used in tools and solid lubricant films for mechanical parts.

[Technical background of the invention and its problems] As the importance of tribology (tribology) in clean environments and special environments is recognized, it has become essential to develop various surface treatment technologies to improve tribological characteristics. .

For this reason, a testing machine that can accurately evaluate the tribological properties of a surface treatment layer is important.

Hardness tests and scratch tests have been widely used as conventional means for examining the tribological properties of thin films.

Regarding the hardness test, Knoop hardness or Vickers hardness is measured, and both tests are conducted under a relatively high load using a diamond indenter or the like.

For this reason, this hardness tester has the problem that the measurement results are easily influenced by the underlying material, making it difficult to accurately measure the characteristics of the thin film itself.

In response to this, there has been an attempt to precisely measure the penetration depth of the needle and evaluate the hardness from the relationship between the load and depth. This test method is useful for measuring the hardness of the thin film itself, but
It was not possible to obtain data regarding the lubricity of the thin film, the adhesion between the thin film and the substrate, etc., and it was difficult to fully evaluate the tribological properties of the thin film.

On the other hand, a scratch tester is used to evaluate the adhesion between a thin film and a substrate.The sample surface is scratched with a diamond cone under a constant load or while gradually increasing the load, and the point at which the film breaks is detected using an AE sensor ( Acoustic emission sensors (acoustic emission sensors) are available on the market. This scratch tester moves a test piece in a straight line and presses a diamond cone against it, and tests are performed under relatively high loads.

Therefore, even with this scratch tester, there was a problem in that it was difficult to accurately evaluate the deformation characteristics of the thin film itself.

In particular, when evaluating the softness of solid lubricant films, lubricity of lubricating materials, deformation resistance, etc., it is necessary to evaluate the amount of deformation, load, and frictional resistance simultaneously, and such evaluations are difficult in the conventional examples described above. Met.

[Object of the Invention] This invention was made based on the above circumstances, and provides a thin film tribology tester that can evaluate the tribological properties of wear-resistant thin films, lubricating thin films, etc. with high precision and relatively easily. The purpose is to provide.

[Summary of the Invention] In order to achieve the above object, the first invention provides a testing machine for evaluating properties such as hardness, lubricity, abrasion resistance, and adhesion of a thin film, which is a thin film to be measured. Equipped with a test piece of
a fixed stage part, a rotation mechanism part that rotates the stage part at a predetermined speed, an indenter that scratches the surface of the test piece, and a linear movement mechanism part that moves the indenter in a straight line perpendicular to the surface of the test piece. , a positioning mechanism section that positions the indenter in a radial direction relative to the rotation center of the test piece at a desired position, a displacement measuring means that detects the amount of penetration of the indenter into the test piece, and a load and frictional resistance corresponding to the amount of penetration. By having a load/resistance detection means for detecting In the scratch test, the amount of penetration of the indenter is accurately measured, and the load and frictional resistance corresponding to this amount of penetration are simultaneously detected.

Further, the second invention adds means for detecting information regarding peeling or destruction of the thin film to the structure of the first invention, thereby achieving the effect of the first invention and further improving the relationship between the thin film and the base. This allows for accurate evaluation of the adhesion between the two.

[Embodiments of the invention] Embodiments of the present invention will be described below based on the drawings.

1 to 3 are diagrams showing an embodiment of the present invention.

FIG. 1 is a side view showing the overall configuration, FIG. 2 is a perspective view of the load/resistance detection means, and FIG. 3 is a front view showing scratch marks on the test piece.

First, to explain the configuration, in Fig. 1, 1 is a base;
On one end side, a ball bearing 4 is provided on a support member 3 that is erected on the slider 2, and a stage 6 for mounting and fixing a test piece 5 is mounted on this ball bearing 4. It is rotatably supported at the shaft 7.

The rotating shaft 7 is connected to an output shaft 9 of a motor 8. 1
An angle sensor 1 is attached to the rotating shaft 7, and the rotation speed of the motor 8 and the rotation angle of the test piece 5 are controlled by this angle sensor.

The motor 8, the angle sensor 11, and the like constitute a rotation mechanism that rotates the stage section 6 at a predetermined speed.

It should be noted that if an air bearing or the like is used for the ball bearing 4, rotation control can be performed with even higher precision.

On the other hand, on the other end side of the base 1, a linear shaft 14 is supported by a support member 13 erected on the slider 12 so as to be movable in the axial direction. The motor 1 is installed on the back side of the linear shaft 14.
A linear spindle 16 is provided which is driven linearly by gear means or the like.

Further, a load/resistance detection means 18 is attached to the distal end side of the linear shaft 14 via a mounting member 17. Then, a diamond indenter 1 is placed on the upper side of the load/resistance detection means 18.
9 and a displacement meter (one means of displacement measurement 1) 21 are attached.

In addition to diamond, the indenter 19 is made of a metal such as steel, copper, or another material such as ceramic, depending on the object to be evaluated.

The indenter 19 is linearly driven by the aforementioned linear spindle 16 together with the load/resistance detection means 18 .

Therefore, by the motor 15 and the linear spindle 16,
A linear movement mechanism section that moves the indenter 19 in a straight line is configured.

The motor 15 in the linear motion mechanism section starts driving in synchronization with the motor 8 in the rotation mechanism section.

Further, the slider 12 is used to set the amount of deviation of the indenter 19 in the radial direction with respect to the rotation center of the test piece 5 mounted and fixed on the stage section 6. This slider 12 allows the indenter 19 to be positioned at a desired position. A positioning mechanism section for positioning is configured.

The displacement meter 21 detects the positional relationship between one indenter and the test piece 5, and measures the amount of penetration of the tip of the indenter 19 into the test piece 5. Alternatively, a method that can detect the amount of displacement with high precision, such as a method for measuring the amount of reflected light using an optical fiber, is applied. Furthermore, as the displacement meter 21, an electric micro or the like is incorporated, and the supporting part of the indenter 19 and the stage part 6 fixing the test piece 5 are used.
You may also find the positional relationship such as At this time, by providing a detection end electrode that moves straight together with the indenter 19 and a disk-shaped electrode that rotates together with the test piece 5, or by using the test piece 5 as it is as an electrode, the penetration depth at each position can be determined with high precision. can be monitored.

FIG. 2 shows the configuration of the load/resistance detection means 18 in more detail.
, 22b, and the second parallel plate spring 2 in the direction perpendicular thereto.
3a and 23b are provided.

A strain gauge 24 for detecting frictional resistance is attached to the first parallel plate springs 22a, 22b, and the second parallel plate springs 23a,
A strain gauge 25 for load detection is attached to the 23b side.

Furthermore, an AE sensor (acoustic emission sensor) 26 is attached to the upper end of the load/resistance detection means 18. The AE sensor 26 detects information regarding peeling or destruction of the thin film on the test piece 5.

Next, the test method and effects will be explained using FIG.

A test piece 5 on which a thin film to be measured is formed is mounted and fixed on a stage section 6. Next, by adjusting the slider 12, the amount of deviation of the indenter 19 in the radial direction with respect to the rotation center 27a of the test piece 5 is set to a predetermined amount.

The amount of deviation between the center of rotation 27a of the test piece 5 and the tip of the indenter 19 becomes the radius of rotation of the scratch.

The motor 8 in the rotation mechanism is driven, and the test piece 5 is rotated at a constant speed. The motor 15 in the linear motion mechanism section is driven in synchronization with the drive of the motor 8, and the indenter 19 moves forward at a predetermined speed to make an incision from the contact starting point 28a at a constant angle, and an arc-shaped scratch test is performed. It will be done.

At the point where the scratch marks 29a have been made one rotation, the rotation of the test piece 5 is stopped under the control of the angle sensor 11.

During approximately one rotation of the scratch test using the indenter 19,
The displacement meter 21 accurately monitors the amount of penetration of the tip of the indenter 19 into the test piece 5, and the load/resistance detection means 1
8, the load and frictional resistance corresponding to this intrusion amount are simultaneously detected.

At the same time, the AE sensor 26 detects information regarding peeling or destruction of the thin film, and data for evaluating adhesion is obtained.

After testing the scratch marks 29a for one revolution, the slider 12 is adjusted again to change the amount of deviation of the indenter 19 in the radial direction with respect to the rotation center 27a of the test piece 5, and cuts are sequentially made from the contact start points 28b and 28c. , a scratch test consisting of concentric scratch marks 29b and 29C is performed.

After completing multiple tests about the rotation center 27a, the holding position of the test piece 5 is changed, the rotation center is moved to 27b,
Repeat the same scratch test as above.

In this way, the surface of the test piece 5 is tested with high density.

Also, since the radial position of the indenter 19 can be set arbitrarily,
Even if the test piece 5 is a relatively small piece, a scratch test can be performed appropriately.

Therefore, the tribological properties of the thin film to be measured can be accurately evaluated with high precision from the various measurement data of the amount of penetration, load, and frictional resistance obtained as described above, as well as information regarding peeling or destruction of the thin film. be done.

Next, FIG. 4 shows another embodiment of the present invention.

This embodiment is equipped with an SEM (scanning electron microscope) and an optical microscope to enable simultaneous observation of the scratch marks 29a to 29C using these observation means.

In FIG. 4, parts that are the same as or equivalent to those in FIGS. 1 and 2 are designated by the same reference numerals and redundant explanations will be omitted.

In FIG. 4, 31 is a vacuum chamber, 32 is a rotation introduction part that rotatably supports the rotating shaft 7 to which the stage part 6a is attached;
33 is an optical system, and 34 is an SEM.

In this embodiment, the sample mounting surface of the stage section 6a is inclined at a required angle, and the linear motion mechanism shown in FIG. 1 is not provided.

When the indenter 19 is stopped and the test piece 5 mounted at an angle is rotated, the load of the indenter 19 on the test piece 5 can be gradually increased by rotation, and the indenter 19 is moved at a constant linear speed. It can be cut in. Note that at this time, the slider 12 may also be used to linearly feed the indenter 19.

Since the test piece 5 is installed at an angle as described above,
The scratch marks 29a to 29c can be observed using the SEM 34 simultaneously with the measurement of various data such as the amount of penetration, load, and frictional resistance, and can also be examined afterwards.

Therefore, according to this example, the mechanism of friction and damage to the thin film can be evaluated more accurately.

[Effects of the Invention] As explained above, according to the configuration of the first invention, it is possible to easily perform multiple scratch tests concentrically on a test piece, and in each arc scratch test, the indenter is The amount of penetration is accurately measured, and the load and frictional resistance corresponding to the amount of penetration are simultaneously detected. Therefore, there is an advantage that the tribological properties of wear-resistant thin films, lubricating thin films, etc. can be evaluated with high precision and relatively easily.

Further, according to the configuration of the second invention, in addition to the effect of the first invention, the adhesion between the thin film and the base can be detected with high precision, so that it is possible to detect the adhesion between the thin film and the base with high accuracy. This has the advantage that tribological characteristics can be evaluated more accurately.

Therefore, the thin film tribology testing machine according to the first and second inventions is suitable for research and development of surface treatment processes such as wear-resistant hard films used for tools, solid lubricant films for mechanical parts, etc., and wear-resistant film products. It can be appropriately used for quality control or acceptance inspection of lubricating film products, etc.

[Brief explanation of the drawing]

Fig. 1 is a partially cutaway side view showing an embodiment of a thin film tribology testing machine according to the present invention, Fig. 2 is a perspective view of the load/resistance detection means in the same embodiment, and Fig. 3 is the same embodiment. FIG. 4 is a front view showing scratch marks on a test piece according to the present invention, and FIG. 4 is a side view showing an embodiment of the present invention. 5: Test piece, 6.6a: Stage section, 8: Motor constituting the rotation mechanism section, 11: Angle sensor, 12 Nislider (positioning mechanism section), 15: Motor constituting the linear motion mechanism section, 16: Linear spindle , 18: load/resistance detection means, 19: indenter, 21: displacement meter (displacement measurement means), 22a, 22b: first parallel leaf spring, 23a, 23b: second parallel leaf spring, 24.25: strain Gauge, 26: AE sensor, 27a, 28a: Center of rotation of test piece, 29a to 29C: Scratch mark.

Claims (4)

[Claims] (1) A testing machine for evaluating properties such as hardness, lubricity, abrasion resistance, and adhesion of thin films, which includes a stage section on which a thin film test piece to be measured is mounted and fixed, and a stage section that a rotation mechanism that rotates at a predetermined speed; an indenter that scratches the surface of the test piece; a linear motion mechanism that moves the indenter in a straight line perpendicular to the surface of the test piece; a positioning mechanism for positioning the radial position at a desired position; a displacement measuring means for detecting the amount of penetration of the indenter into the test piece;
1. A thin film tribology tester comprising: resistance detection means. (2) The load/resistance detection means includes a first parallel plate spring extending in the same direction as the direction of linear movement of the indenter and a second parallel plate spring extending in a direction perpendicular to the direction of linear movement of the indenter; Claim 1, characterized in that a strain gauge for detecting frictional resistance is attached to the first parallel plate spring, and a strain gauge for detecting load is attached to the second parallel plate spring. The thin film tribology tester described. (3) A testing machine for evaluating properties such as hardness, lubricity, abrasion resistance, and adhesion of thin films, which includes a stage section on which a thin film test piece to be measured is mounted and fixed, and a stage section that a rotation mechanism that rotates at a predetermined speed; an indenter that scratches the surface of the test piece; a linear motion mechanism that moves the indenter in a straight line perpendicular to the surface of the test piece; a positioning mechanism for positioning the radial position at a desired position; a displacement measuring means for detecting the amount of penetration of the indenter into the test piece;
A thin film tribology tester comprising a resistance detection means and a means for detecting information regarding peeling or destruction of a thin film. (4) The load/resistance detection means includes a first parallel plate spring extending in the same direction as the direction of linear movement of the indenter and a second parallel plate spring extending in a direction perpendicular to the direction of linear movement of the indenter; Claim 3, characterized in that a strain gauge for detecting frictional resistance is attached to the first parallel plate spring, and a strain gauge for detecting load is attached to the second parallel plate spring. The thin film tribology tester described.