JPS6365221U - - Google Patents
Info
- Publication number
- JPS6365221U JPS6365221U JP15946786U JP15946786U JPS6365221U JP S6365221 U JPS6365221 U JP S6365221U JP 15946786 U JP15946786 U JP 15946786U JP 15946786 U JP15946786 U JP 15946786U JP S6365221 U JPS6365221 U JP S6365221U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- substrate
- etched
- storage tank
- inclined nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15946786U JPH029548Y2 (ja�@�@) | 1986-10-20 | 1986-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15946786U JPH029548Y2 (ja�@�@) | 1986-10-20 | 1986-10-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6365221U true JPS6365221U (ja�@�@) | 1988-04-30 |
| JPH029548Y2 JPH029548Y2 (ja�@�@) | 1990-03-09 |
Family
ID=31083929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15946786U Expired JPH029548Y2 (ja�@�@) | 1986-10-20 | 1986-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH029548Y2 (ja�@�@) |
-
1986
- 1986-10-20 JP JP15946786U patent/JPH029548Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH029548Y2 (ja�@�@) | 1990-03-09 |