JPS6363941U - - Google Patents

Info

Publication number
JPS6363941U
JPS6363941U JP15772086U JP15772086U JPS6363941U JP S6363941 U JPS6363941 U JP S6363941U JP 15772086 U JP15772086 U JP 15772086U JP 15772086 U JP15772086 U JP 15772086U JP S6363941 U JPS6363941 U JP S6363941U
Authority
JP
Japan
Prior art keywords
piezoelectric
drive board
driver
drive
temperature correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15772086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15772086U priority Critical patent/JPS6363941U/ja
Publication of JPS6363941U publication Critical patent/JPS6363941U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Micromachines (AREA)
JP15772086U 1986-10-14 1986-10-14 Pending JPS6363941U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15772086U JPS6363941U (fr) 1986-10-14 1986-10-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15772086U JPS6363941U (fr) 1986-10-14 1986-10-14

Publications (1)

Publication Number Publication Date
JPS6363941U true JPS6363941U (fr) 1988-04-27

Family

ID=31080532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15772086U Pending JPS6363941U (fr) 1986-10-14 1986-10-14

Country Status (1)

Country Link
JP (1) JPS6363941U (fr)

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