JPS6363897B2 - - Google Patents
Info
- Publication number
- JPS6363897B2 JPS6363897B2 JP8251881A JP8251881A JPS6363897B2 JP S6363897 B2 JPS6363897 B2 JP S6363897B2 JP 8251881 A JP8251881 A JP 8251881A JP 8251881 A JP8251881 A JP 8251881A JP S6363897 B2 JPS6363897 B2 JP S6363897B2
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- photosensitive resin
- photosensitive
- resin plate
- biaxially stretched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920005989 resin Polymers 0.000 claims description 23
- 239000011347 resin Substances 0.000 claims description 23
- 229920005992 thermoplastic resin Polymers 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000002904 solvent Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 9
- -1 polyethylene Polymers 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229920006352 transparent thermoplastic Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8251881A JPS57198464A (en) | 1981-06-01 | 1981-06-01 | Manufacture of printing plate surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8251881A JPS57198464A (en) | 1981-06-01 | 1981-06-01 | Manufacture of printing plate surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57198464A JPS57198464A (en) | 1982-12-06 |
| JPS6363897B2 true JPS6363897B2 (enrdf_load_stackoverflow) | 1988-12-08 |
Family
ID=13776751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8251881A Granted JPS57198464A (en) | 1981-06-01 | 1981-06-01 | Manufacture of printing plate surface |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57198464A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0677370U (ja) * | 1992-03-10 | 1994-10-28 | 豊治 宮本 | 簡易映像送受信装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108535953B (zh) * | 2018-03-29 | 2021-08-10 | 上海华力集成电路制造有限公司 | 光刻掩模版 |
-
1981
- 1981-06-01 JP JP8251881A patent/JPS57198464A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0677370U (ja) * | 1992-03-10 | 1994-10-28 | 豊治 宮本 | 簡易映像送受信装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57198464A (en) | 1982-12-06 |
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