JPS6363642U - - Google Patents
Info
- Publication number
- JPS6363642U JPS6363642U JP15745086U JP15745086U JPS6363642U JP S6363642 U JPS6363642 U JP S6363642U JP 15745086 U JP15745086 U JP 15745086U JP 15745086 U JP15745086 U JP 15745086U JP S6363642 U JPS6363642 U JP S6363642U
- Authority
- JP
- Japan
- Prior art keywords
- connector
- projecting end
- pass box
- cleaning device
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Description
第１〜３図は本考案によるクリーンルーム用清
掃装置の一実施例を示す図であり、第１図はその
全体構成図、第２図はそのコネクタがパスボツク
スに取付けられた状態を示す要部断面図、第３図
はそのパスボツクスの側面図である。
１……壁部、２……パスボツクス、８……コネ
クタ、９ａ……内方突出端部、１０ａ……外方突
出端部、２１……真空差込弁（開閉弁）、２２…
…パイプ、２４……吸引具、２５……吸引清掃機
。
Figures 1 to 3 are diagrams showing an embodiment of the clean room cleaning device according to the present invention. Figure 1 is a diagram of its overall configuration, and Figure 2 is a cross-sectional view of the main part showing the state in which the connector is attached to a pass box. FIG. 3 is a side view of the pass box. DESCRIPTION OF SYMBOLS 1...Wall part, 2...Pass box, 8...Connector, 9a...Inward projecting end, 10a...Outward projecting end, 21...Vacuum insertion valve (on/off valve), 22...
...Pipe, 24...Suction tool, 25...Suction cleaning machine.
Claims (1)
クスと、パスボツクスを貫通してクリーンルーム
の壁部の内方および外方を互いに連通するようパ
スボツクスに着脱自在に取付けられ、クリーンル
ームの壁部の内方および外方にそれぞれ突出する
内方突出端部および外方突出端部を有するパイプ
状のコネクタと、屈曲自在なパイプを介して前記
コネクタの内方突出端部に連結される吸引具と、
前記コネクタの外方突出端部に連結される吸引清
掃機と、前記コネクタに設けられ、コネクタに吸
引具が連結されたときにコネクタを開放し、コネ
クタから吸引具が取外されたときにコネクタを閉
止する開閉弁と、を備えたことを特徴とするクリ
ーンルーム用清掃装置。 A pass box is attached to the wall of the clean room, and a pass box is removably attached to the pass box so that the inside and outside of the wall of the clean room communicate with each other through the pass box. a pipe-shaped connector having an inwardly projecting end and an outwardly projecting end, and a suction tool connected to the inwardly projecting end of the connector via a bendable pipe;
a suction cleaning device connected to an outwardly projecting end of the connector; and a suction cleaning device provided in the connector, which opens the connector when a suction tool is connected to the connector, and opens the connector when the suction tool is removed from the connector. A clean room cleaning device characterized by comprising: an on-off valve that closes the on-off valve;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15745086U JPH0325073Y2 (en) | 1986-10-14 | 1986-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15745086U JPH0325073Y2 (en) | 1986-10-14 | 1986-10-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6363642U true JPS6363642U (en) | 1988-04-27 |
| JPH0325073Y2 JPH0325073Y2 (en) | 1991-05-31 |
Family
ID=31080008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15745086U Expired JPH0325073Y2 (en) | 1986-10-14 | 1986-10-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325073Y2 (en) |
-
1986
- 1986-10-14 JP JP15745086U patent/JPH0325073Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0325073Y2 (en) | 1991-05-31 |