JPS6362667A - ウエハ−用ラツプ盤の上定盤吊懸け装置 - Google Patents

ウエハ−用ラツプ盤の上定盤吊懸け装置

Info

Publication number
JPS6362667A
JPS6362667A JP61206561A JP20656186A JPS6362667A JP S6362667 A JPS6362667 A JP S6362667A JP 61206561 A JP61206561 A JP 61206561A JP 20656186 A JP20656186 A JP 20656186A JP S6362667 A JPS6362667 A JP S6362667A
Authority
JP
Japan
Prior art keywords
surface plate
spherical
suspension
bearing box
hanging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61206561A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0466668B2 (enrdf_load_stackoverflow
Inventor
Toshio Sekikawa
利夫 関川
Yukio Kata
片　幸夫
Toshio Miyashita
宮下　利雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Naoetsu Electronics Co Ltd
Shin Etsu Engineering Co Ltd
Original Assignee
Naoetsu Electronics Co Ltd
Shin Etsu Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Naoetsu Electronics Co Ltd, Shin Etsu Engineering Co Ltd filed Critical Naoetsu Electronics Co Ltd
Priority to JP61206561A priority Critical patent/JPS6362667A/ja
Publication of JPS6362667A publication Critical patent/JPS6362667A/ja
Publication of JPH0466668B2 publication Critical patent/JPH0466668B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP61206561A 1986-09-01 1986-09-01 ウエハ−用ラツプ盤の上定盤吊懸け装置 Granted JPS6362667A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61206561A JPS6362667A (ja) 1986-09-01 1986-09-01 ウエハ−用ラツプ盤の上定盤吊懸け装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61206561A JPS6362667A (ja) 1986-09-01 1986-09-01 ウエハ−用ラツプ盤の上定盤吊懸け装置

Publications (2)

Publication Number Publication Date
JPS6362667A true JPS6362667A (ja) 1988-03-18
JPH0466668B2 JPH0466668B2 (enrdf_load_stackoverflow) 1992-10-23

Family

ID=16525429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61206561A Granted JPS6362667A (ja) 1986-09-01 1986-09-01 ウエハ−用ラツプ盤の上定盤吊懸け装置

Country Status (1)

Country Link
JP (1) JPS6362667A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5997382A (en) * 1997-01-23 1999-12-07 Toyota Jidosha Kabushiki Kaisha Method of processing sealing surface of casting and grindstone suitable for use therein

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5997382A (en) * 1997-01-23 1999-12-07 Toyota Jidosha Kabushiki Kaisha Method of processing sealing surface of casting and grindstone suitable for use therein

Also Published As

Publication number Publication date
JPH0466668B2 (enrdf_load_stackoverflow) 1992-10-23

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