JPS6359319U - - Google Patents

Info

Publication number
JPS6359319U
JPS6359319U JP15482586U JP15482586U JPS6359319U JP S6359319 U JPS6359319 U JP S6359319U JP 15482586 U JP15482586 U JP 15482586U JP 15482586 U JP15482586 U JP 15482586U JP S6359319 U JPS6359319 U JP S6359319U
Authority
JP
Japan
Prior art keywords
reaction
gas inlet
gas
upper electrode
cvd apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15482586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15482586U priority Critical patent/JPS6359319U/ja
Publication of JPS6359319U publication Critical patent/JPS6359319U/ja
Pending legal-status Critical Current

Links

JP15482586U 1986-10-07 1986-10-07 Pending JPS6359319U (US07847105-20101207-C00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15482586U JPS6359319U (US07847105-20101207-C00016.png) 1986-10-07 1986-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15482586U JPS6359319U (US07847105-20101207-C00016.png) 1986-10-07 1986-10-07

Publications (1)

Publication Number Publication Date
JPS6359319U true JPS6359319U (US07847105-20101207-C00016.png) 1988-04-20

Family

ID=31074976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15482586U Pending JPS6359319U (US07847105-20101207-C00016.png) 1986-10-07 1986-10-07

Country Status (1)

Country Link
JP (1) JPS6359319U (US07847105-20101207-C00016.png)

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