JPS6359318U - - Google Patents
Info
- Publication number
- JPS6359318U JPS6359318U JP15388086U JP15388086U JPS6359318U JP S6359318 U JPS6359318 U JP S6359318U JP 15388086 U JP15388086 U JP 15388086U JP 15388086 U JP15388086 U JP 15388086U JP S6359318 U JPS6359318 U JP S6359318U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- crucible
- heater
- beam generator
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 230000007423 decrease Effects 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15388086U JPS6359318U (en, 2012) | 1986-10-07 | 1986-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15388086U JPS6359318U (en, 2012) | 1986-10-07 | 1986-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6359318U true JPS6359318U (en, 2012) | 1988-04-20 |
Family
ID=31073165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15388086U Pending JPS6359318U (en, 2012) | 1986-10-07 | 1986-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6359318U (en, 2012) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59152296A (ja) * | 1983-02-17 | 1984-08-30 | Agency Of Ind Science & Technol | 分子線エピタキシヤル成長における分子線強度制御方法 |
| JPS6057611A (ja) * | 1983-08-09 | 1985-04-03 | Fujitsu Ltd | 分子線源シヤツタ |
-
1986
- 1986-10-07 JP JP15388086U patent/JPS6359318U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59152296A (ja) * | 1983-02-17 | 1984-08-30 | Agency Of Ind Science & Technol | 分子線エピタキシヤル成長における分子線強度制御方法 |
| JPS6057611A (ja) * | 1983-08-09 | 1985-04-03 | Fujitsu Ltd | 分子線源シヤツタ |