JPS6358743U - - Google Patents

Info

Publication number

JPS6358743U

JPS6358743U JP15244486U JP15244486U JPS6358743U JP S6358743 U JPS6358743 U JP S6358743U JP 15244486 U JP15244486 U JP 15244486U JP 15244486 U JP15244486 U JP 15244486U JP S6358743 U JPS6358743 U JP S6358743U

Authority

JP

Japan

Prior art keywords

electrodes

pair

titanium oxide

oxide layer

oxygen sensor

Prior art date

1986-10-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 3
• 229910052760 oxygen Inorganic materials 0.000 claims 3
• 239000001301 oxygen Substances 0.000 claims 3
• 238000002955 isolation Methods 0.000 claims 1
• 229910052751 metal Inorganic materials 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 229910052845 zircon Inorganic materials 0.000 description 1
• GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1