JPS6358738U - - Google Patents

Info

Publication number
JPS6358738U
JPS6358738U JP15323086U JP15323086U JPS6358738U JP S6358738 U JPS6358738 U JP S6358738U JP 15323086 U JP15323086 U JP 15323086U JP 15323086 U JP15323086 U JP 15323086U JP S6358738 U JPS6358738 U JP S6358738U
Authority
JP
Japan
Prior art keywords
scanning
light
detector
light source
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15323086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15323086U priority Critical patent/JPS6358738U/ja
Publication of JPS6358738U publication Critical patent/JPS6358738U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP15323086U 1986-10-06 1986-10-06 Pending JPS6358738U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15323086U JPS6358738U (US07709020-20100504-C00041.png) 1986-10-06 1986-10-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15323086U JPS6358738U (US07709020-20100504-C00041.png) 1986-10-06 1986-10-06

Publications (1)

Publication Number Publication Date
JPS6358738U true JPS6358738U (US07709020-20100504-C00041.png) 1988-04-19

Family

ID=31071926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15323086U Pending JPS6358738U (US07709020-20100504-C00041.png) 1986-10-06 1986-10-06

Country Status (1)

Country Link
JP (1) JPS6358738U (US07709020-20100504-C00041.png)

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